Fundamentals of slurry design for CMP of metal and dielectric (vol 27, pg 752, 2002)

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作者：

Singh, RK

Lee, SM

Choi, KS

Basim, GB

Chen, Z

Moudgil, BM

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MRS BULLETIN | 2002年 / 27卷 / 11期

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T [工业技术];

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08 ;

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页码：833 / 833

页数：1

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