Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

被引：74

作者：

He, Fei ^{[1
,2
]}

Cheng, Ya ^{[1
]}

Xu, Zhizhan ^{[1
]}

Liao, Yang ^{[1
,2
]}

Xu, Jian ^{[1
,2
]}

Sun, Haiyi ^{[1
]}

Wang, Chen ^{[1
]}

Zhou, Zenghui ^{[1
]}

Sugioka, Koji ^{[3
]}

Midorikawa, Katsumi ^{[3
]}

Xu, Yonghao ^{[4
]}

Chen, Xianfeng ^{[4
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

[3] RIKEN Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan

[4] Shanghai Jiao Tong Univ, Dept Phys, Inst Opt & Photon, Shanghai 200240, Peoples R China

来源：

OPTICS LETTERS | 2010年 / 35卷 / 03期

关键词：

PHOTOSENSITIVE GLASS; PULSES; SHAPE;

D O I：

10.1364/OL.35.000282

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized. (C) 2010 Optical Society of America

引用

页码：282 / 284

页数：3

共 13 条

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