Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser

被引：74

作者：

He, Fei ^{[1
,2
]}

Cheng, Ya ^{[1
]}

Xu, Zhizhan ^{[1
]}

Liao, Yang ^{[1
,2
]}

Xu, Jian ^{[1
,2
]}

Sun, Haiyi ^{[1
]}

Wang, Chen ^{[1
]}

Zhou, Zenghui ^{[1
]}

Sugioka, Koji ^{[3
]}

Midorikawa, Katsumi ^{[3
]}

Xu, Yonghao ^{[4
]}

Chen, Xianfeng ^{[4
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

[3] RIKEN Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan

[4] Shanghai Jiao Tong Univ, Dept Phys, Inst Opt & Photon, Shanghai 200240, Peoples R China

来源：

OPTICS LETTERS | 2010年 / 35卷 / 03期

关键词：

PHOTOSENSITIVE GLASS; PULSES; SHAPE;

D O I：

10.1364/OL.35.000282

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized. (C) 2010 Optical Society of America

引用

页码：282 / 284

页数：3

共 13 条

[1] Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching [J].

Bellouard, Y ;

Said, A ;

Dugan, M ;

Bado, P .

OPTICS EXPRESS, 2004, 12 (10) :2120-2129

[2] Weighing of biomolecules, single cells and single nanoparticles in fluid [J].

Burg, Thomas P. ;

Godin, Michel ;

Knudsen, Scott M. ;

Shen, Wenjiang ;

Carlson, Greg ;

Foster, John S. ;

Babcock, Ken ;

Manalis, Scott R. .

NATURE, 2007, 446 (7139) :1066-1069

[3] Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing [J].

Cheng, Y ;

Sugioka, K ;

Midorikawa, K .

OPTICS LETTERS, 2004, 29 (17) :2007-2009

[4] Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser [J].

Cheng, Y ;

Sugioka, K ;

Midorikawa, K ;

Masuda, M ;

Toyoda, K ;

Kawachi, M ;

Shihoyama, K .

OPTICS LETTERS, 2003, 28 (13) :1144-1146

[5] Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser [J].

Cheng, Y ;

Sugioka, K ;

Midorikawa, K ;

Masuda, M ;

Toyoda, K ;

Kawachi, M ;

Shihoyama, K .

OPTICS LETTERS, 2003, 28 (01) :55-57

[6] Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica [J].

Hnatovsky, C ;

Taylor, RS ;

Simova, E ;

Bhardwaj, VR ;

Rayner, DM ;

Corkum, PB .

OPTICS LETTERS, 2005, 30 (14) :1867-1869

[7] Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses [J].

Li, Y ;

Itoh, K ;

Watanabe, W ;

Yamada, K ;

Kuroda, D ;

Nishii, J ;

Jiang, YY .

OPTICS LETTERS, 2001, 26 (23) :1912-1914

[8] Femtosecond laser-assisted three-dimensional microfabrication in silica [J].

Marcinkevicius, A ;

Juodkazis, S ;

Watanabe, M ;

Miwa, M ;

Matsuo, S ;

Misawa, H ;

Nishii, J .

OPTICS LETTERS, 2001, 26 (05) :277-279

[9] Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching [J].

Maselli, Valeria ;

Osellame, Roberto ;

Cerullo, Giulio ;

Ramponi, Roberta ;

Laporta, Paolo ;

Magagnin, Luca ;

Cavallotti, Pietro Luigi .

APPLIED PHYSICS LETTERS, 2006, 88 (19)

[10] 3-D microstructuring inside photosensitive glass by femtosecond laser excitation [J].

Masuda, M ;

Sugioka, K ;

Cheng, Y ;

Aoki, N ;

Kawachi, M ;

Shihoyama, K ;

Toyoda, K ;

Helvajian, H ;

Midorikawa, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (05) :857-860

← 1 2 →