Mapping mechanical properties on the nanoscale using atomic-force acoustic microscopy

被引:29
作者
Hurley, D. C. [1 ]
Kopycinska-Muller, M. [1 ]
Kos, A. B. [1 ]
机构
[1] Natl Inst Stand & Technol, Boulder, CO 80305 USA
关键词
D O I
10.1007/s11837-007-0005-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Tools are being developed that use the atomic-force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic-force acoustic microscopy involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers the understanding of patterned surfaces, thin films, and nanoscale structures.
引用
收藏
页码:23 / 29
页数:7
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