共 10 条
[1]
BART FB, 1990, P WINT ANN M ASME DA
[2]
ETSION I, 1992, P ASME STLE TRIB C S
[4]
KANEKO R, 1991, P IEEE MICRO ELECTRO, P1
[7]
MEHREGANY M, 1990, FEB P IEEE MICR EL M, P1
[9]
Suzuki S., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P143, DOI 10.1109/MEMSYS.1991.114785