Improvement of photocatalytic efficiency of TiO2 thin films prepared by pulsed laser deposition

被引:12
|
作者
Yoshida, T [1 ]
Fukami, Y [1 ]
Okoshi, M [1 ]
Inoue, N [1 ]
机构
[1] Natl Def Acad, Dept Elect & Elect Engn, Yokosuka, Kanagawa 2398686, Japan
关键词
pulsed laser deposition (PLD); TiO2; photocatalytic effect; anatase-type; cluster; methylene blue;
D O I
10.1143/JJAP.44.3059
中图分类号
O59 [应用物理学];
学科分类号
摘要
The photocatalytic efficiency of TiO2 thin films was improved by the deposition of clusters during pulsed laser deposition in an oxygen atmosphere. It was found that the oxygen pressure and the distance between the target and the substrate affected the number and size of clusters. The Clusters deposited at the substrate temperature of 250 degrees C and the oxygen pressure of 100-300 mTorr were anatase-type crystal. In the photocatalitic evaluation, the film deposition with anatase-type clusters showed a high efficiency.
引用
收藏
页码:3059 / 3062
页数:4
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