Morpho-structural and optical characterization of silicon nanowires intended for microarray substrates

被引：0

作者：

Popescu, M. A. ^{[1
]}

Mihalache, I ^{[1
]}

Romanitan, C. ^{[1
]}

Popescu, M. C. ^{[2
]}

Gogianu, L. ^{[1
]}

Simion, M. ^{[1
]}

机构：

[1] IMT Bucharest, Natl Inst Res & Dev Microtechnol, 126A Erou Iancu Nicolae St, Bucharest 077190, Romania

[2] SC Ronexprim SRL, 5 Cotiturii St, Bucharest 010885, Romania

来源：

2021 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS) | 2021年

关键词：

silicon nanowires; X-ray diffraction; scanning electron microscopy; time-resolved spectroscopy; photoluminescence; microarray; FABRICATION;

D O I：

10.1109/CAS52836.2021.9604193

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

One-step metal assisted chemical etching (1-MACE) of silicon (Si) resulted in vertical silicon nanowires (SiNWs). Field emission scanning electron microscopy (FE-SEM) revealed SiNWs with lengths around 6, 8 and 10 mu m. High resolution X-Ray Diffraction (XRD) showed the formation of monocrystalline Si (001). Photoluminescence measurements disclosed a broad spectral band on one of the samples with four emission peaks.

引用

页码：265 / 268

页数：4

共 47 条

[1] Influence of Cu dopant on the morpho-structural and optical properties ZnO nanoparticles
Matei, Alina
Tucureanu, Vasilica
Popescu, Marian Catalin
Romanitan, Cosmin
Mihalache, Iuliana
CERAMICS INTERNATIONAL, 2019, 45 (08) : 10826 - 10833
[2] Morpho-structural and chemical characterization of paper based materials with functionalized surface
Peter, Anca
Cozmuta, Leonard Mihaly
Nicula, Camelia
Cozmuta, Anca Mihaly
Apjok, Robert
Talasman, Catalina Mihaela
Drazic, Goran
Penas, Antonio
Jesus Calahorro, Antonio
Nzekoue, Franks Kamgang
Huang, Xiaohui
Sagratini, Gianni
Silvi, Stefania
MATERIALS CHEMISTRY AND PHYSICS, 2021, 267
[3] Optical Characterization of Luminescent Silicon Nanowires
Jung, Daeyoon
Sohn, Honglae
Kim, Yongmin
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2019, 74 (02) : 140 - 144
[4] The effect of precipitation conditions on the morpho-structural and optical properties of some zinc oxidic based compounds
Muresan, L. E.
Perhaita, I.
Branzanic, A. M. V.
Sarosi, C.
Barbu-Tudoran, L.
Borodi, G.
Petean, I.
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2024, 109 (03) : 795 - 809
[5] Effects of silver and gold catalytic activities on the structural and optical properties of silicon nanowires
Lajvardi, M.
Eshghi, H.
Izadifard, M.
Ghazi, M. E.
Goodarzi, A.
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2016, 75 : 136 - 143
[6] Spectroscopic and Morpho-Structural Characterization of Copper Indium Disulfide-Zinc Oxide Nanocomposites with Photocatalytic Properties
Stefan, M.
Leostean, C.
Toloman, D.
Popa, A.
Pana, O.
Barbu-Tudoran, L.
ANALYTICAL LETTERS, 2023, 56 (02) : 183 - 199
[7] Structural and optical characterization of Mg-doped GaAs nanowires grown on GaAs and Si substrates
Falcao, B. P.
Leitao, J. P.
Correia, M. R.
Soares, M. R.
Morales, F. M.
Manuel, J. M.
Garcia, R.
Gustafsson, A.
Moreira, M. V. B.
de Oliveira, A. G.
Gonzalez, J. C.
JOURNAL OF APPLIED PHYSICS, 2013, 114 (18)
[8] Controlled synthesis and optical transmission characteristics of silicon nanowires on colloid patterned glass substrates
Lee, Dong Hyun
Pyun, Yong Bum
Son, Kwang-Soo
Choung, Jae-Woong
Lee, Jung-Min
Son, Seong Jun
Park, Won Il
JOURNAL OF CERAMIC PROCESSING RESEARCH, 2009, 10 (01): : 1 - 5
[9] Mutiscale substrates based on hydrogel-incorporated silicon nanowires for protein patterning and microarray-based immunoassays
Han, Sang Won
Lee, Seulah
Hong, Juree
Jang, Eunji
Lee, Taeyoon
Koh, Won-Gun
BIOSENSORS & BIOELECTRONICS, 2013, 45 : 129 - 135
[10] Characterization of silicon nanowires grown on silicon, stainless steel and indium tin oxide substrates
Philip Jennings
Zhong-Tao Jiang
Nicholas M. W. Wyatt
David Parlevliet
Christine Creagh
Chun-Yang Yin
Hantarto Widjaja
Nick Mondinos
Applied Physics A, 2013, 113 : 723 - 728

← 1 2 3 4 5 →