Very Large Scale Integration of Nanopatterned YBa2Cu3O7-δ Josephson Junctions in a Two-Dimensional Array

被引：44

作者：

Cybart, Shane A. ^{[1
,2
]}

Anton, Steven M. ^{[1
,2
]}

Wu, Stephen M. ^{[1
,2
]}

Clarke, John ^{[1
,2
]}

Dynes, Robert C. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA

来源：

NANO LETTERS | 2009年 / 9卷 / 10期

关键词：

QUANTUM INTERFERENCE DEVICES; HTS SFQ CIRCUITS; ION DAMAGE; DC SQUIDS; VOLTAGE; NANOLITHOGRAPHY; SUPERCONDUCTORS; IMPLANTATION; MULTILAYER; TRANSITION;

D O I：

10.1021/nl901785j

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Very large scale integration of Josephson functions in a two-dimensional series-parallel array has been achieved by Ion irradiating a YBa(2)cu(3)O(7-delta) film through slits in a nanofabricated mask created with electron beam lithography and reactive ion etching. The mask consisted of 15820 high aspect ratio (20:1), 36 nm wide slits that restricted the irradiation in the film below to form Josephson Junctions. Characterizing each parallel segment k, containing 28 junctions, with a single critical current I-ck we found a standard deviation in I-ck Of about 16%.

引用

页码：3581 / 3585

页数：5

共 40 条

[31] CURRENT-VOLTAGE CHARACTERISTICS OF JOSEPHSON JUNCTIONS [J].

STEWART, WC .

APPLIED PHYSICS LETTERS, 1968, 12 (08) :277-&

[32] Recent progress in SFQ device technologies in Japan [J].

Tanabe, Keiichi ;

Hidaka, Mutsuo .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2007, 17 (02) :494-499

[33] DC SQUID - NOISE AND OPTIMIZATION [J].

TESCHE, CD ;

CLARKE, J .

JOURNAL OF LOW TEMPERATURE PHYSICS, 1977, 29 (3-4) :301-331

[34]

TINCHEV SS, 1990, SCI TECHNOL, V3

[35] ION-BEAM-INDUCED METAL-INSULATOR-TRANSITION IN YBA2CU3O7-DELTA - A MOBILITY EDGE [J].

VALLES, JM ;

WHITE, AE ;

SHORT, KT ;

DYNES, RC ;

GARNO, JP ;

LEVI, AFJ ;

ANZLOWAR, M ;

BALDWIN, K .

PHYSICAL REVIEW B, 1989, 39 (16) :11599-11602

[36] Improvement in reproducibility of multilayer and junction process for HTS SFQ circuits [J].

Wakana, H ;

Adachi, S ;

Kamitani, A ;

Nakayama, K ;

Ishimaru, Y ;

Oshikubo, Y ;

Tarutani, Y ;

Tanabe, K .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2005, 15 (02) :153-156

[37] Development of thin film multilayer structures with smooth surfaces for HTS SFQ circuits [J].

Wakana, H ;

Adachi, S ;

Kamitani, A ;

Nakayama, K ;

Ishimaru, Y ;

Tarutani, Y ;

Tanabe, K .

IEICE TRANSACTIONS ON ELECTRONICS, 2005, E88C (02) :208-215

[38] A SERIES ARRAY OF DC SQUIDS [J].

WELTY, RP ;

MARTINIS, JM .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (02) :2924-2926

[39] ANISOTROPIC NATURE OF HIGH-TEMPERATURE SUPERCONDUCTIVITY IN SINGLE-CRYSTAL Y1BA2CU3O7-X [J].

WORTHINGTON, TK ;

GALLAGHER, WJ ;

DINGER, TR .

PHYSICAL REVIEW LETTERS, 1987, 59 (10) :1160-1163

[40] Long, Highly-Ordered High-Temperature Superconductor Nanowire Arrays [J].

Xu, Ke ;

Heath, James R. .

NANO LETTERS, 2008, 8 (11) :3845-3849

← 1 2 3 4 →