Very Large Scale Integration of Nanopatterned YBa2Cu3O7-δ Josephson Junctions in a Two-Dimensional Array

被引：43

作者：

Cybart, Shane A. ^{[1
,2
]}

Anton, Steven M. ^{[1
,2
]}

Wu, Stephen M. ^{[1
,2
]}

Clarke, John ^{[1
,2
]}

Dynes, Robert C. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA

来源：

NANO LETTERS | 2009年 / 9卷 / 10期

关键词：

QUANTUM INTERFERENCE DEVICES; HTS SFQ CIRCUITS; ION DAMAGE; DC SQUIDS; VOLTAGE; NANOLITHOGRAPHY; SUPERCONDUCTORS; IMPLANTATION; MULTILAYER; TRANSITION;

D O I：

10.1021/nl901785j

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Very large scale integration of Josephson functions in a two-dimensional series-parallel array has been achieved by Ion irradiating a YBa(2)cu(3)O(7-delta) film through slits in a nanofabricated mask created with electron beam lithography and reactive ion etching. The mask consisted of 15820 high aspect ratio (20:1), 36 nm wide slits that restricted the irradiation in the film below to form Josephson Junctions. Characterizing each parallel segment k, containing 28 junctions, with a single critical current I-ck we found a standard deviation in I-ck Of about 16%.

引用

页码：3581 / 3585

页数：5

共 40 条

[1] VOLTAGE DUE TO THERMAL NOISE IN DC JOSEPHSON EFFECT [J].

AMBEGAOKAR, V ;

HALPERIN, BI .

PHYSICAL REVIEW LETTERS, 1969, 22 (25) :1364-+

[2] THEORY OF MOTION OF VORTICES IN SUPERCONDUCTORS [J].

BARDEEN, J ;

STEPHEN, MJ .

PHYSICAL REVIEW, 1965, 140 (4A) :1197-+

[3] Electron beam lithography and ion implantation techniques for fabrication of high-T-c Josephson junctions [J].

Barth, R ;

Hamidi, AH ;

Hadam, B ;

Hollkott, J ;

Dunkmann, D ;

Auge, J ;

Kurz, H .

MICROELECTRONIC ENGINEERING, 1996, 30 (1-4) :407-410

[4] MAGNETIZATION OF HIGH-FIELD SUPERCONDUCTORS [J].

BEAN, CP .

REVIEWS OF MODERN PHYSICS, 1964, 36 (1P1) :31-+

[5] Nanotechnology for next generation Josephson voltage standards [J].

Benz, SP ;

Dresselhaus, PD ;

Burroughs, CJ .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2001, 50 (06) :1513-1518

[6] High-quality planar high-Tc Josephson junctions -: art. no. 102502 [J].

Bergeal, N ;

Grison, X ;

Lesueur, J ;

Faini, G ;

Aprili, M ;

Contour, JP .

APPLIED PHYSICS LETTERS, 2005, 87 (10)

[7] Very large YBa2Cu3O7-Josephson-junction-arrays [J].

Burkhardt, H ;

Brügmann, O ;

Rauther, A ;

Schnell, F ;

Schilling, M .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1999, 9 (02) :3153-3156

[8] High-performance magnetic field sensor based on superconducting quantum interference filters [J].

Caputo, P ;

Oppenländer, J ;

Häussler, C ;

Tomes, J ;

Friesch, A ;

Träuble, T ;

Schopohl, N .

APPLIED PHYSICS LETTERS, 2004, 85 (08) :1389-1391

[9] An absolute magnetometer based on dc Superconducting QUantum Interference Devices [J].

Carelli, P ;

Castellano, MG ;

Flacco, K ;

Leoni, R ;

Torrioli, G .

EUROPHYSICS LETTERS, 1997, 39 (05) :569-574

[10] DIRECT MEASUREMENT OF THE SUPERCONDUCTING PROPERTIES OF SINGLE GRAIN-BOUNDARIES IN Y1BA2CU3O7-DELTA [J].

CHAUDHARI, P ;

MANNHART, J ;

DIMOS, D ;

TSUEI, CC ;

CHI, J ;

OPRYSKO, MM ;

SCHEUERMANN, M .

PHYSICAL REVIEW LETTERS, 1988, 60 (16) :1653-1656

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