Modeling of FGM-TFBARS with the method of reverberation-ray matrix

被引：0

作者：

Chen, W. Q. ^{[1
]}

Guo, Y. Q. ^{[1
]}

机构：

[1] Zhejiang Univ, Dept Civil Engn, Minist Educ, Key Lab Soft Soils & Geoenvironm Engn, Hangzhou 310027, Peoples R China

来源：

ADVANCES IN HETEROGENEOUS MATERIAL MECHANICS 2008 | 2008年

关键词：

piezoelectric materials; method of reverberation-ray matrix; inhomogeneity;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A thin-film bulk acoustic wave resonator (TFBAR) usually consists of a thin-film piezoelectric layer and two electrodes, thus forming a layered structure. In this paper, we establish the formulations for wave propagation analysis of piezoelectric laminates according to the method of reverberation-ray matrix. The inhomogeneity of piezoelectric thin-film, which may be induced during the material fabrication, is taken into consideration, along with the approximate laminate model. The correctness of the method is illustrated through numerical examples, and the effect of material inhomogencity is discussed.

引用

页码：1626 / 1630

页数：5

共 10 条

[1] PROPAGATOR MATRICES IN ELASTIC WAVE AND VIBRATION PROBLEMS [J].