Probabilistic Sensitivity Analysis of Wear Property for MEMS Gas Bearing

In this study, the sensitivity of MEMS gas bearing' performance to the wear in different axial and circumferential positions is investigated in detail. Rarefaction effect is introduced into the transient and steady lubrication equation, and then the finite element method (FEM) is employed to solve the equations. The stochastic process is adopted to simulate wear distribution and view of probability is proposed to describe the change laws of the static and dynamic performance of the bearing. Then, the static and dynamic characteristics of the bearing in 50 wear conditions are calculated for each case. Furthermore, the standard deviations and correlation coefficients of the bearing performance sample points are analyzed to demonstrate the influence degree of wear in different positions.