Photochemical depassivation of hydrogenated (100) nitrogen surface of cubic boron nitride

被引:8
作者
Komatsu, S
机构
[1] Natl. Inst. for Res. in Inorg. Mat., Tsukuba, Ibaraki 305
关键词
D O I
10.1557/JMR.1997.0228
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The passivation of the nitrogen top-layered (100) surface of cBN by hydrogen was theoretically predicted recently to be related to the difficulty of chemical vapor deposition of cubic boron nitride. The possibility of photochemical depassivation of this surface was suggested by the anti-bonding nature of the surface H-N bonds at the lowest unoccupied molecular orbital; that was demonstrated by AM1 molecular orbital calculations using large cBN clusters such as B30N32H64(2+) and B30N32H62(2BH(3)).
引用
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页码:1675 / 1677
页数:3
相关论文
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