High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

被引：51

作者：

Bui, Catvu H. ^{[1
]}

Zheng, Jiangjun ^{[1
]}

Hoch, S. W. ^{[2
]}

Lee, Lennon Y. T. ^{[1
]}

Harris, J. G. E. ^{[2
,3
]}

Wong, Chee Wei ^{[1
]}

机构：

[1] Columbia Univ, Opt Nanostruct Lab, New York, NY 10027 USA

[2] Yale Univ, Dept Phys, New Haven, CT 06520 USA

[3] Yale Univ, Dept Appl Phys, New Haven, CT 06520 USA

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 02期

基金：

美国国家科学基金会;

关键词：

CAVITY;

D O I：

10.1063/1.3658731

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mechanical ringdown measurements of 50-nm-thick PhC membranes demonstrate GRs near 1064 nm, leading to a similar to 4 x increase in reflectivity while preserving high mechanical Q factors of up to similar to 5 x 10(6). The results would allow improvement of membrane-in-the-middle OM systems by virtue of increased OM coupling, presenting a path towards ground state cooling of such a membrane and observations of related quantum effects. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3658731]

引用

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