Optical constants of sol-gel derived TiO2 films characterized by spectroscopic ellipsometry

被引:4
作者
Wang Xiao-Dong [1 ]
Shen Jun [1 ]
Wang Sheng-Zhao [1 ]
Zhang Zhi-Hua [1 ]
机构
[1] Tongji Univ, Pohl Inst Solid State Phys, Shanghai Key Lab Special Artificial Microstruct M, Shanghai 200092, Peoples R China
基金
国家高技术研究发展计划(863计划); 中国国家自然科学基金;
关键词
optical constants; TiO2; film; sol-gel; ellipsometry; THICKNESS;
D O I
10.7498/aps.58.8027
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Nanostructured titanium oxide films were deposited on silicon substrate via sol-gel dip coating method with tetrabutyl titanate as precursor. With reflective spectroscopic ellipsometry, the ellipsometric parameters Psi and Delta of TiO2 films were measured. Then, with the Cauchy model, the ellipsometric data were fitted, and both the thickness and the optical constants at 380-800 nm wavelength of the films were obtained. A comparison was made between the reflectance of the films derived with the spectrophotometer and the simulated results. Meanwhile, the thickness of the films was calculated by interference method. Moreover, with the atomic force microscopy the surface microstructures of the films annealed at different temperatures were observed, and the relationship between the surface microstructures and optical constants of films was further discussed. The results showed that Cauchy model works well in describing the dispersion relationship of the TiO2 films, and the variation rules of optical constants (the refractive index, the extinction coefficient) with wavelength were obtained. The optical constants of the films were related with the microstructure. Those simulated reflectance spectrum accorded well with the measured result. And with a deviation of only 2.5%, the calculated value of the thickness was in accordance with which was obtained by spectroscopic ellipsometry.
引用
收藏
页码:8027 / 8032
页数:6
相关论文
共 16 条
[1]   INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE ;
THEETEN, JB .
PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302
[2]  
AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, P283
[3]  
Fujishima A., 1972, Nature, V37, P238
[4]   Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films [J].
Liang Li-Ping ;
Zhang Lei ;
Sheng Yong-Gang ;
Xu Yao ;
Wu Dong ;
Sun Yu-Han ;
Jiang Xiao-Dong ;
Wei Xiao-Feng .
ACTA PHYSICA SINICA, 2007, 56 (06) :3596-3601
[5]   Determination of the optical constants of sol-gel derived ZrO2 films simply from the transmission spectra [J].
Liang Li-Ping ;
Hao Jian-Ying ;
Qin Mei ;
Zheng Jian-Jun .
ACTA PHYSICA SINICA, 2008, 57 (12) :7906-7911
[6]   Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometer [J].
Liao Nai-Man ;
Li Wei ;
Jiang Ya-Dong ;
Kuang Yue-Jun ;
Qi Kang-Cheng ;
Li Shi-Bin ;
Wu Zhi-Ming .
ACTA PHYSICA SINICA, 2008, 57 (03) :1542-1547
[7]   Nanoporous TiO2 coatings for infrared detectors [J].
Shen, J ;
Yang, TH ;
Zhang, QY ;
Wang, J ;
Zhang, QY .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 26 (1-3) :1029-1032
[8]  
SHEN XC, 2002, OPTICAL SPECTROSCOPY, P38
[9]  
Sheng Yong-gang, 2008, High Power Laser and Particle Beams, V20, P75
[10]   Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants [J].
Synowicki, RA .
THIN SOLID FILMS, 1998, 313 :394-397