Monte Carlo simulation of discharge plasmas using fine subslabs

A self-consistent Monte Carlo modelling technique has been developed to study discharge plasmas. The fine subslab technique and weight probability method are introduced. These two methods are applied to a DC Ar-like gas discharge simulation. The discharge profiles obtained are in good agreement with the experimental ones. The electron energy loss mechanism in the cathode region is explained in detail. The electron energy distribution variation in the cathode fall and Rat plasma density regions are expressed in a wide range of magnitude. The electron mean energy profile has a local minimum point which corresponds to the maximum excitation collision point. An electron group with the energy of 6 to 10 eV is observed in the flat plasma density region. This energy corresponds to the potential difference from the maximum excitation collision point to this flat region. Electron energy distributions have a wide range of over 6 orders of magnitude with only 5000 test particles.