Smart CMOS mid-infrared sensor array

被引：16

作者：

Popa, Daniel ^{[1
]}

Ali, Sped Zeeshan ^{[2
]}

Hoppe, Richard ^{[1
,2
]}

Dai, Ying ^{[1
]}

Udrea, Florin ^{[1
,2
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB30FA, England

[2] Ams Sensors UK Ltd, Cambridge CB4 0DL, England

来源：

OPTICS LETTERS | 2019年 / 44卷 / 17期

关键词：

THERMOPILE;

D O I：

10.1364/OL.44.004111

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p(+) and n(+) elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16 x 16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 mu m waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region. (C) 2019 Optical Society of America

引用

页码：4111 / 4114

页数：4

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