Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating

被引：9
|
作者：
Chapman, Navid [1 ]
Chapman, Mingyu [1 ]
Euler, William B. [1 ]
机构：
[1] Univ Rhode Isl, Dept Chem, Kingston, RI 02881 USA
来源：
COATINGS | 2021年 / 11卷 / 02期
关键词：
spin-coating; PMMA; film thickness model;
D O I：
10.3390/coatings11020198
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.
引用
收藏
页码：1 / 12
页数：12
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