Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating

被引：9

作者：

Chapman, Navid ^{[1
]}

Chapman, Mingyu ^{[1
]}

Euler, William B. ^{[1
]}

机构：

[1] Univ Rhode Isl, Dept Chem, Kingston, RI 02881 USA

来源：

COATINGS | 2021年 / 11卷 / 02期

关键词：

spin-coating; PMMA; film thickness model;

D O I：

10.3390/coatings11020198

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.

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页码：1 / 12

页数：12

相关论文

共 30 条

[21] Dynamics of polymer film formation during spin coating [J].

Mouhamad, Y. ;

Mokarian-Tabari, P. ;

Clarke, N. ;

Jones, R. A. L. ;

Geoghegan, M. .

JOURNAL OF APPLIED PHYSICS, 2014, 116 (12)

[22] Solvent Effects on the Thermal and Mechanical Properties of Poly(methyl methacrylate) Casted from Concentrated Solutions [J].

Patra, Niranjan ;

Barone, Alberto C. ;

Salerno, Marco .

ADVANCES IN POLYMER TECHNOLOGY, 2011, 30 (01) :12-20

[23]

PATRONE E, 1966, MAKROMOLEKUL CHEM, V94, P52

[24] Kinetics of Field-Induced Surface Patterns on PMMA [J].

Peng, Jyun-siang ;

Yang, Fuqian ;

Chiang, Donyau ;

Lee, Sanboh .

LANGMUIR, 2016, 32 (18) :4602-4609

[25] Optical constants measurement of single-layer thin films on transparent substrates [J].

Penzkofer, A ;

Drotleff, E ;

Holzer, W .

OPTICS COMMUNICATIONS, 1998, 158 (1-6) :221-230

[26] SOLUBILITY, SOLVENCY, AND SOLUBILITY PARAMETERS [J].

VANDYK, JW ;

FRISCH, HL ;

WU, DT .

INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1985, 24 (03) :473-478

[27]

Vashishtha SR, 2002, INDIAN J CHEM TECHN, V9, P316

[28] VISCOSITY OF DILUTE AND MODERATELY CONCENTRATED POLYMER SOLUTIONS [J].

WEISSBERG, SG ;

SIMHA, R ;

ROTHMAN, S .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1951, 47 (04) :298-314

[29]

Yamamoto H, 2009, HANSEN SOLUBILITY PA

[30] Detection of gas-phase explosive analytes using fluorescent spectroscopy of thin films of xanthene dyes [J].

Zhang, Hui Qi ;

Euler, William B. .

SENSORS AND ACTUATORS B-CHEMICAL, 2016, 225 :553-562