Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating

被引：9
|
作者：
Chapman, Navid [1 ]
Chapman, Mingyu [1 ]
Euler, William B. [1 ]
机构：
[1] Univ Rhode Isl, Dept Chem, Kingston, RI 02881 USA
来源：
COATINGS | 2021年 / 11卷 / 02期
关键词：
spin-coating; PMMA; film thickness model;
D O I：
10.3390/coatings11020198
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.
引用
收藏
页码：1 / 12
页数：12
相关论文
共 50 条
  • [1] DEPOSITION OF THIN PHTHALOCYANINE FILMS BY SPIN-COATING
    CRITCHELY, SM
    WILLIS, MR
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1994, 76 (05) : 809 - 814
  • [2] Fabrication of barium titanate nanoparticles/poly (methylmethacrylate) composite films by a combination of deposition process and spin-coating technique
    Kobayashi, Yoshio
    Odo, Aiko
    JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2014, 3 (04): : 290 - 295
  • [3] Spin-coating deposition of thermoresponsive microgel thin films
    Nigro, Valentina
    Buratti, Elena
    Limosani, Francesca
    Angelini, Roberta
    Dinelli, Franco
    Franco, Silvia
    Nichelatti, Enrico
    Piccinini, Massimo
    Vincenti, Maria Aurora
    Montereali, Rosa Maria
    Ruzicka, Barbara
    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2023, 674
  • [4] SPIN-COATING OF VERY THIN POLYMER-FILMS
    EXTRAND, CW
    POLYMER ENGINEERING AND SCIENCE, 1994, 34 (05): : 390 - 394
  • [5] Spin-coating of vertically stratified thin liquid films
    McIntyre, A.
    Brush, L. N.
    JOURNAL OF FLUID MECHANICS, 2010, 647 : 265 - 285
  • [6] Understanding Solidification of Polythiophene Thin Films during Spin-Coating: Effects of Spin-Coating Time and Processing Additives
    Na, Jin Yeong
    Kang, Boseok
    Sin, Dong Hun
    Cho, Kilwon
    Park, Yeong Don
    SCIENTIFIC REPORTS, 2015, 5
  • [7] Understanding Solidification of Polythiophene Thin Films during Spin-Coating: Effects of Spin-Coating Time and Processing Additives
    Jin Yeong Na
    Boseok Kang
    Dong Hun Sin
    Kilwon Cho
    Yeong Don Park
    Scientific Reports, 5
  • [8] Fabrication by Spin-Coating and Optical Characterization of Poly(styrene-co-acrylonitrile) Thin Films
    Hedl, Elizabeth
    Fabijanic, Ivana
    Rakic, Iva Srut
    Vadla, Ivan
    Sancho-Parramon, Jordi
    COATINGS, 2021, 11 (09)
  • [9] spin-coating antireflective films
    不详
    ELECTRONICS LETTERS, 2018, 54 (06) : 331 - 331
  • [10] YSZ thin films deposited by spin-coating for IT-SOFCs
    Xu, XY
    Xia, CR
    Huang, SG
    Peng, DK
    CERAMICS INTERNATIONAL, 2005, 31 (08) : 1061 - 1064
12345