Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating

被引：9

作者：

Chapman, Navid ^{[1
]}

Chapman, Mingyu ^{[1
]}

Euler, William B. ^{[1
]}

机构：

[1] Univ Rhode Isl, Dept Chem, Kingston, RI 02881 USA

来源：

COATINGS | 2021年 / 11卷 / 02期

关键词：

spin-coating; PMMA; film thickness model;

D O I：

10.3390/coatings11020198

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.

引用

收藏

页码：1 / 12

页数：12

相关论文

共 30 条

[1] Study of solution-cast films of PMMA by dielectric spectroscopy: influence of the nature of the solvent on alpha and beta relaxations [J].

Bistac, S ;

Schultz, J .

INTERNATIONAL JOURNAL OF ADHESION AND ADHESIVES, 1997, 17 (03) :197-201

[2]

Brandrup J., 1999, Polymer Handbook, VII

[3] Structural Evolution of Ultrathin Films of Rhodamine 6G on Glass [J].

Chapman, Mingyu ;

Mullen, Matthew ;

Novoa-Ortega, Elsa ;

Alhasani, Mona ;

Elman, James F. ;

Euler, William B. .

JOURNAL OF PHYSICAL CHEMISTRY C, 2016, 120 (15) :8289-8297

[4] PROPERTIES OF DILUTE POLYMER SOLUTIONS .2. LIGHT SCATTERING AND VISCOMETRIC PROPERTIES OF SOLUTIONS OF CONVENTIONAL POLYMETHYL METHACRYLATE [J].

COHNGINSBERG, E ;

FOX, TG ;

MASON, HF .

POLYMER, 1962, 3 (01) :97-109

[5] Deposition of polymer films by spin casting: A quantitative analysis [J].

Danglad-Flores, Jose ;

Eickelmann, Stephan ;

Riegler, Hans .

CHEMICAL ENGINEERING SCIENCE, 2018, 179 :257-264

[6] FLOW OF A VISCOUS LIQUID ON A ROTATING DISK [J].

EMSLIE, AG ;

BONNER, FT ;

PECK, LG .

JOURNAL OF APPLIED PHYSICS, 1958, 29 (05) :858-862

[7] Thermal degradation of poly(methyl methacrylate) (PMMA): modelling of DTG and TG curves [J].

Ferriol, M ;

Gentilhomme, A ;

Cochez, M ;

Oget, N ;

Mieloszynski, JL .

POLYMER DEGRADATION AND STABILITY, 2003, 79 (02) :271-281

[8] Thermogravimetric analysis of thermal stability of poly(methyl methacrylate) films modified with photoinitiators [J].

Galka, Piotr ;

Kowalonek, Jolanta ;

Kaczmarek, Halina .

JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY, 2014, 115 (02) :1387-1394

[9] Effect of solvent evaporation rate on "Skin" formation during spin coating of complex solutions [J].

Haas, DE ;

Quijada, JN .

SOL-GEL OPTICS V, 2000, 3943 :280-284

[10] Spin coating of thin and ultrathin polymer films [J].

Hall, DB ;

Underhill, P ;

Torkelson, JM .

POLYMER ENGINEERING AND SCIENCE, 1998, 38 (12) :2039-2045