共 27 条
[1]
Versatile light-control schemes based on diffractive optics for laser drilling, cutting and joining technologies for microelectronic and micromechanical components and devices
[J].
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III,
2004, 5339
:475-487
[2]
BELFORTE D, 2005, LASER FOCUS WORLD MA
[3]
Laser micromachining techniques for industrial MEMS applications
[J].
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS IV,
2005, 5713
:190-199
[5]
CHEN CH, 2005, P ICALEO 2005 LAS I
[6]
Writing waveguides in glass with a femtosecond laser
[J].
OPTICS LETTERS,
1996, 21 (21)
:1729-1731
[7]
FERU P, 2002, LASER FOCUS WORL MAY, P50
[8]
FUKUYO F, 2005, P LPM 2005 JAP LAS P, P322
[9]
*GSI GROUP, WAFERREPAIR TM M450
[10]
GU B, 2003, P 36 INT S MICR INT, P104