Light Emitting Diodes as an alternative ambient illumination source in photolithography environment

被引：10

作者：

Corell, Dennis ^{[1
]}

Ou, Haiyan ^{[1
]}

Dam-Hansen, Carsten ^{[1
]}

Petersen, Paul-Michael ^{[1
]}

Friis, Dan ^{[2
]}

机构：

[1] Tech Univ Denmark, Dept Photon Engn, DK-2800 Lyngby, Denmark

[2] RGB Lamps, DK-4800 Nykobing, Denmark

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 20期

关键词：

D O I：

10.1364/OE.17.017293

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We explored an alternative light emitting diode (LED)-based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination. (C) 2009 Optical Society of America

引用

页码：17293 / 17302

页数：10