Optimization of a resonant cavity enhanced MSM photodetector

被引：7
作者：
Gvozdic, DM
Nikolic, PL
Radunovic, JB
机构：
[1] Univ Belgrade, Fac Elect Engn, YU-11120 Belgrade, Yugoslavia
[2] MIT, Cambridge, MA 02139 USA
来源：
SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2000年 / 15卷 / 06期
关键词：
D O I：
10.1088/0268-1242/15/6/326
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a 2D model and numerical simulation of a submicron resonant cavity enhanced metal-semiconductor-metal photodetector (RCE MSM-PD). Nonstationary effects caused by electron intervalley transfer are taken into account in calculating the RCE MSM-PD response. The analysis of the quantum efficiency and the 3 dB bandwidth shows that there is an optimum channel thickness, for which a maximum bandwidth-quantum efficiency product can be reached.
引用
收藏
页码：630 / 637
页数：8
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