Multilayer antireflective and protective coatings comprising amorphous diamond and amorphous hydrogenated germanium carbide for ZnS optical elements

被引：25

作者：

Zhu, J. Q. ^{[1
]}

Jiang, C. Z. ^{[1
]}

Han, X. ^{[1
]}

Han, J. C. ^{[1
]}

Meng, S. H. ^{[1
]}

Hu, C. Q. ^{[2
]}

Zheng, W. T. ^{[2
]}

机构：

[1] Harbin Inst Technol, Ctr Composite Mat, Harbin 150080, Peoples R China

[2] Jilin Univ, Dept Mat Sci, Changchun 130012, Peoples R China

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 10期

基金：

中国国家自然科学基金;

关键词：

optical coatings; amorphous materials; plasma deposition; optical properties; hardness;

D O I：

10.1016/j.tsf.2007.07.199

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To effectively protect and improve the transmittance of ZnS optical elements in the far infrared band, combined amorphous diamond (a-D) and amorphous hydrogenated germanium carbide (a-Ge1-xCx:H) films have been developed. The optical interference coatings were designed according to the layer optics theory. The a-D films, of which refractive index and film thickness were controlled by changing substrate bias and deposition time respectively, were deposited by filtered cathodic vacuum arc technology. The a-Ge1-xCx:H films were prepared by radio frequency sputtering technology. During this process their refractive index was modulated by changing the gas flow rate ratio and their film thickness was controlled by the flow rate ratio and deposition time. It has been shown that the combined films are superexcellent antireflective and protective coatings for ZnS optical elements. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：3117 / 3122

页数：6

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