Deep Ultra-Violet Beam Profile Measurement of KrF Laser Using Laser Induced Fluorescence

An instrument was built to measure the output fluorescence response characteristics of a 248nm KrF laser using 4mm-thick fluorescent glass as a screen. Experiments show that the fluorescent intensity is linear related with the laser intensity no more than 0.7J/cm(2). And the intensity distribution of laser induced fluorescence responds spatially the intensity distribution of beam profile from the LPX-150 laser. So we can use high-homogeneity optical glasses as fluorescence wavelength converter for deep UV beam profile measurements.