Hardness of bulk single-crystal GaN and AlN

被引:0
作者
Yonenaga, I [1 ]
机构
[1] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 980, Japan
来源
MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH | 2002年 / 7卷 / 06期
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The hardness of single-crystal GaN and AlN of 0.5-mm-thickness was measured by the Vickers indentation method in the temperature range 20 - 1400degreesC. The hardness of GaN and AlN is 10.2 and 17.7 GPa, respectively, at room temperature. The nano-indentation hardness of single-crystal AlN was measured at room temperature as 18 GPa, harder than GaN and InN. Up to about 1100degreesC, GaN and AlN maintain its hardness similar to that of Sic and thus, a high mechanical stability for GaN and AlN at elevated temperatures is deduced. Yield strength of nitrides is discussed.
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