Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films

被引：73

作者：

Abou-Ras, D. ^{[1
]}

Caballero, R. ^{[1
]}

Fischer, C. -H. ^{[1
]}

Kaufmann, C. A. ^{[1
]}

Lauermann, I. ^{[1
]}

Mainz, R. ^{[1
]}

Moenig, H. ^{[1
]}

Schoepke, A. ^{[1
]}

Stephan, C. ^{[1
]}

Streeck, C. ^{[1
]}

Schorr, S. ^{[2
]}

Eicke, A. ^{[3
]}

Doebeli, M. ^{[4
]}

Gade, B. ^{[5
]}

Hinrichs, J. ^{[6
]}

Nunney, T. ^{[7
]}

Dijkstra, H. ^{[8
]}

Hoffmann, V. ^{[9
]}

Klemm, D. ^{[9
]}

Efimova, V. ^{[9
]}

Bergmaier, A. ^{[10
]}

Dollinger, G. ^{[10
]}

Wirth, T. ^{[11
]}

Unger, W. ^{[11
]}

Rockett, A. A. ^{[12
]}

Perez-Rodriguez, A. ^{[13
,14
]}

Alvarez-Garcia, J. ^{[15
]}

Izquierdo-Roca, V. ^{[14
]}

Schmid, T. ^{[16
]}

Choi, P. -P. ^{[17
]}

Mueller, M. ^{[18
]}

Bertram, F. ^{[18
]}

Christen, J. ^{[18
]}

Khatri, H. ^{[19
]}

Collins, R. W. ^{[19
]}

Marsillac, S. ^{[19
]}

Koetschau, I. ^{[20
]}

机构：

[1] Helmholtz Zentrum Berlin Mat & Energie, D-14109 Berlin, Germany

[2] Free Univ Berlin, Dept Geosci, D-12249 Berlin, Germany

[3] Zentrum Sonnenenergie & Wasserstoff Forsch, D-70565 Stuttgart, Germany

[4] Swiss Fed Inst Technol, Lab Ion Beam Phys, CH-8093 Zurich, Switzerland

[5] Thermo Fisher Sci, D-63303 Dreieich, Germany

[6] Thermo Fisher Sci, D-28199 Bremen, Germany

[7] Thermo Fisher Sci, E Grinstead RH19 1UB, W Sussex, England

[8] Thermo Fisher Sci, NL-4817 Breda, Netherlands

[9] IFW Dresden, D-01069 Dresden, Germany

[10] Univ Bundeswehr Munchen, D-85577 Neubiberg, Germany

[11] Federal Inst Mat Res & Testing, D-12205 Berlin, Germany

[12] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

[13] Catalonia Inst Energy Res IREC, St Adria Del Besos 08930, Barcelona, Spain

[14] Univ Barcelona, Dept Elect, IN2UB, E-08028 Barcelona, Spain

[15] Ctr Rec & Invest Catalunya CRIC, Barcelona 08012, Spain

[16] Swiss Fed Inst Technol, Dept Chem & Appl Biosci, CH-8093 Zurich, Switzerland

[17] Max Planck Inst Iron Res, D-40237 Dusseldorf, Germany

[18] Univ Magdeburg, Inst Expt Phys, D-39106 Magdeburg, Germany

[19] Univ Toledo, Ctr Photovolta Innovat & Commercializat PVIC, Toledo, OH 43606 USA

[20] Ctr Therm Photovolta AG, Technol Thin Film, D-89143 Blaubeuren, Germany

来源：

MICROSCOPY AND MICROANALYSIS | 2011年 / 17卷 / 05期

关键词：

elemental distributions; comparison; depth profiling; chemical mapping; thin films; solar cells; chalcopyrite-type; Cu(In; Ga)Se-2; DEPTH PROFILE ANALYSIS; X-RAY; SOLAR-CELLS; ATOM-PROBE; EMISSION-SPECTROSCOPY; CU(IN; GA)SE-2; CUINSE2; GROWTH; SPECTROMETRY; ELLIPSOMETRY;

D O I：

10.1017/S1431927611000523

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The present work shows results on elemental distribution analyses in Cu(In,Ga)Se-2 thin films for solar cells performed by use of wavelength-dispersive and energy-dispersive X-ray spectrometry (EDX) in a scanning electron microscope, EDX in a transmission electron microscope, X-ray photoelectron, angle-dependent soft X-ray emission, secondary ion-mass (SIMS), time-of-flight SIMS, sputtered neutral mass, glow-discharge optical emission and glow-discharge mass, Auger electron, and Rutherford backscattering spectrometry, by use of scanning Auger electron microscopy, Raman depth profiling, and Raman mapping, as well as by use of elastic recoil detection analysis, grazing-incidence X-ray and electron backscatter diffraction, and grazing-incidence X-ray fluorescence analysis. The Cu(In,Ga)Se-2 thin films used for the present comparison were produced during the same identical deposition run and exhibit thicknesses of about 2 mm. The analysis techniques were compared with respect to their spatial and depth resolutions, measuring speeds, availabilities, and detection limits.

引用

页码：728 / 751

页数：24

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