Raman and SEM studies of nanocrystalline Pd-carbonaceous films

The results of Raman and SEM studies of Pd-carbonaceous films obtained by two methods are presented in this paper. The first method is PVD (Physical Vapour Deposition) with two separated sources containing precursors for films (1 - fullerenes C-60, 2- palladium acetate). The second method consists of two steps, the first step being PVD followed by CVD (Chemical Vapour Deposition) - the second step. In the first step a nanocrystalline Pd-C film is prepared. Later this film is used to obtain a nanoporous Pd - carbonaceous film in the CVD process. Prepared films contain 8 - 34 %wt. Pd. Both kinds of films were studied using Raman and SEM methods. For the films obtained in the two-step method SEM images show porous structure for all samples. Raman spectra for the film with 8 % wt. Pd exhibit C-60 characteristic bands, while Raman spectra for films with higher content of Pd show D and G graphite characteristic bands. Films obtained by PVD are structurally different from films obtained by 2-steps method which is reflected in SEM images where no porous structure has been found.