Metal organic chemical vapor deposition and investigation of ZnO thin films grown on sapphire

被引：16

作者：

Sun, S. ^{[4
]}

Tompa, G. S. ^{[4
]}

Rice, C. ^{[4
]}

Sun, X. W. ^{[3
]}

Lee, Z. S. ^{[1
,2
]}

Lien, S. C. ^{[1
,2
]}

Huang, C. W. ^{[1
,2
]}

Cheng, L. C. ^{[1
,2
]}

Feng, Z. C. ^{[1
,2
]}

机构：

[1] Natl Taiwan Univ, Grad Inst Electroopt Engn, Taipei 10617, Taiwan

[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan

[3] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

[4] Structured Mat Ind Inc, Piscataway, NJ 08854 USA

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 16期

关键词：

ZnO; MOCVD; X-ray diffraction; Raman scattering; photoluminescence; synchrotron radiation;

D O I：

10.1016/j.tsf.2007.07.030

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new type of large area metal organic chemical vapor deposition (MOCVD) system for the growth of high quality and large size ZnO materials is introduced. Materials properties of the un-doped, n- and p-doped ZnO epi-films grown on sapphire substrates by this MOCVD system are studied by various techniques, including high resolution X-ray diffraction (XRD), UV-Visible optical transmission (OT), photoluminescence (PL) and photoluminescence excitation (PLE), synchrotron radiation X-ray photoelectron spectroscopy (SR-XPS). The wurtzite (w) ZnO crystal structures grown with primary (0002) orientation were identified. Results have shown the high crystalline quality of MOCVD-grown ZnO films, indicated by the narrow XRD, PL and Raman line widths, strong PL signals, sharp OT edge and smooth surface. In particular, high p-type carrier concentration of > 10(17) cm(-3) have been achieved besides the good n-type doping in ZnO. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：5571 / 5576

页数：6

共 50 条

[1] Characterization of ZnO Thin Films Grown on c-Sapphire by Pulsed Laser Deposition as Templates for Regrowth of ZnO by Metal Organic Chemical Vapor Deposition
Rogers, D. J.
Teherani, F. Hosseini
Sartel, C.
Sallet, V.
Jomard, F.
Galtier, P.
Razeghi, M.
ZINC OXIDE MATERIALS AND DEVICES IV, 2009, 7217
[2] ZnO thin film grown by metal-organic chemical vapor deposition
Du, GT
Wang, XQ
Yang, SR
Yang, XT
Wang, JZ
Zhang, YT
Liu, D
Ma, Y
Liu, DL
Ong, HC
FRONTIERS OF SOLID STATE CHEMISTRY, 2002, : 383 - 389
[3] Photocatalysis using ZnO thin films and nanoneedles grown by metal-organic chemical vapor deposition
Yang, JL
An, SJ
Park, WI
Yi, GC
Choi, W
ADVANCED MATERIALS, 2004, 16 (18) : 1661 - +
[4] Properties of polycrystalline ZnO thin films by metal organic chemical vapor deposition
Tan, ST
Chen, BJ
Sun, XW
Hu, X
Zhang, XH
Chua, SJ
JOURNAL OF CRYSTAL GROWTH, 2005, 281 (2-4) : 571 - 576
[5] ZnO thin film grown on glass by metal-organic chemical vapor deposition
Ma, X. M.
Yang, X. T.
Wang, C.
Yang, J.
Gao, X. H.
Liu, J. E.
Jing, H.
Du, G. T.
Liu, B. Y.
Ma, K.
2008 2ND IEEE INTERNATIONAL NANOELECTRONICS CONFERENCE, VOLS 1-3, 2008, : 833 - 835
[6] ZnO thin film grown on silicon by metal-organic chemical vapor deposition
Wang, XQ
Yang, SR
Yang, XT
Liu, D
Zhang, YT
Wang, JH
Yin, JZ
Liu, DL
Ong, HC
Du, GT
JOURNAL OF CRYSTAL GROWTH, 2002, 243 (01) : 13 - 18
[7] Influence of annealing on ZnO films grown by metal-organic chemical vapor deposition
Li, HX
Liu, H
Wang, JY
Yao, SS
Cheng, XF
Boughton, RI
MATERIALS LETTERS, 2004, 58 (27-28) : 3630 - 3633
[8] Micro-Raman scattering and microphotoluminescence of GaN thin films grown on sapphire by metal-organic chemical vapor deposition
Feng, ZC
OPTICAL ENGINEERING, 2002, 41 (08) : 2022 - 2031
[9] Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition
Tan, S.T.
Chen, B.J.
Sun, X.W.
Fan, W.J.
Kwok, H.S.
Zhang, X.H.
Chua, S.J.
Journal of Applied Physics, 2005, 98 (01):
[10] Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition
Tan, ST
Chen, BJ
Sun, XW
Fan, WJ
Kwok, HS
Zhang, XH
Chua, SJ
JOURNAL OF APPLIED PHYSICS, 2005, 98 (01)

← 1 2 3 4 5 →