Reliability concerns for HfO2/Si(and ZrO2/Si) systems:: Interface and dielectric traps

被引：0
作者：
Kang, AY [1 ]
Lenahan, PM [1 ]
机构：
[1] Penn State Univ, University Pk, PA 16802 USA
来源：
2003 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP - FINAL REPORT | 2003年
关键词：
Hafnium oxide; charge trapping; interface defects;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on electron photo-injection results in HfO2/Si films using capacitance vs. voltage (CV) and electron spin resonance measurements. CV measurements indicate presence of pre-existing large capture cross section electron traps. Electron spin resonance measurements indicate trapped electrons in the form of O-2(-) superoxide ions. Another center, likely a Hf+3 center, is also observed.
引用
收藏
页码：24 / 27
页数：4
相关论文
共 15 条
  • [1] Generation of superoxide ions at oxide surfaces
    Anpo, M
    Che, M
    Fubini, B
    Garrone, E
    Giamello, E
    Paganini, MC
    [J]. TOPICS IN CATALYSIS, 1999, 8 (3-4) : 189 - 198
  • [2] CHARACTERIZATION AND REACTIVITY OF MOLECULAR-OXYGEN SPECIES ON OXIDE SURFACES
    CHE, M
    TENCH, AJ
    [J]. ADVANCES IN CATALYSIS, 1983, 32 : 1 - 148
  • [3] Electrical properties of HfO2 deposited via atomic layer deposition using Hf(NO3)4 and H2O
    Conley, JF
    Ono, Y
    Solanki, R
    Stecker, G
    Zhuang, W
    [J]. APPLIED PHYSICS LETTERS, 2003, 82 (20) : 3508 - 3510
  • [4] Drago R.S., 1977, Physical Methods in Chemistry
  • [5] AN EPR STUDY ON THE FORMATION OF THE SUPEROXIDE RADICAL ION ON MONOCLINIC ZIRCONIA
    GIAMELLO, E
    VOLANTE, M
    FUBINI, B
    GEOBALDO, F
    MORTERRA, C
    [J]. MATERIALS CHEMISTRY AND PHYSICS, 1991, 29 (1-4) : 379 - 386
  • [6] Gusev E.P., 2001, IEDM Tech. Dig, P451, DOI DOI 10.1109/IEDM.2001.979537
  • [7] The radiation response of the high dielectric-constant hafnium oxide/silicon system
    Kang, AY
    Lenahan, PM
    Conley, JF
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2002, 49 (06) : 2636 - 2642
  • [8] PARAMAGNETIC RESONANCE OF OXYGEN IN ALKALI HALIDES
    KANZIG, W
    COHEN, MH
    [J]. PHYSICAL REVIEW LETTERS, 1959, 3 (11) : 509 - 510
  • [9] LUNSFORD JH, 1973, CATAL REV, V8, P135
  • [10] Transformation of tetragonal zirconia phase to monoclinic phase in the presence of Fe3+ ions as probes:: an EPR study
    Matta, J
    Lamonier, JF
    Abi-Aad, E
    Zhilinskaya, EA
    Aboukaïs, A
    [J]. PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1999, 1 (21) : 4975 - 4980
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