Improving fab productivity with new standards for equipment data acquisition

被引：0
|
作者：
Crispieri, Gino [1 ]
机构：
[1] Int SEMATECH Mfg Initiat, Austin, TX 78741 USA
来源：
SOLID STATE TECHNOLOGY | 2007年 / 50卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Deploying the set of new SEMI standards encompassing equipment data acquisition (EDA) enables the customization of requests by engineers and other fab personnel for equipment data. This enhanced ability to monitor equipment health and performance can directly improve fab productivity.
引用
收藏
页码：45 / +
页数：3
相关论文
共 50 条
  • [21] HOW TO BUY DATA ACQUISITION EQUIPMENT.
    O'Riley, Rowan
    Chilton's instruments & control systems, 1985, 58 (05): : 53 - 57
  • [22] CHECKLIST FOR DATA LOGGING-ACQUISITION EQUIPMENT
    KESSLER, E
    INSTRUMENTS & CONTROL SYSTEMS, 1978, 51 (02): : 51 - 52
  • [23] Equipment Acquisition Data Information Integrated Management
    Wu Yanmei
    Guo Kai
    Wang Qingli
    APPLIED SCIENCE, MATERIALS SCIENCE AND INFORMATION TECHNOLOGIES IN INDUSTRY, 2014, 513-517 : 1342 - 1345
  • [24] IMPROVING LABORATORY PRODUCTIVITY VIA STANDARDS-BASED NETWORKING
    STRONG, S
    HOLMES, D
    AMERICAN LABORATORY, 1990, 22 (14) : 26 - &
  • [25] IMPROVING DATA ACQUISITION IN DYNAMIC MEASUREMENTS
    TAYLOR, JL
    INSTRUMENTATION TECHNOLOGY, 1979, 26 (08): : 51 - 53
  • [26] NEW STANDARDS FOR METHODS OF TESTING DOSIMETRIC EQUIPMENT
    YUDIN, MF
    OSTROMUK.GP
    URYAAV, IA
    KONONOVA, RF
    MEASUREMENT TECHNIQUES-USSR, 1968, (01): : 86 - &
  • [27] CONSTRUCTION EQUIPMENT: NEW PUSH FOR PRODUCTIVITY.
    Dann, Richard T.
    Machine Design, 1981, 53 (10): : 66 - 76
  • [28] NEW SURVEYING EQUIPMENT AIDS PRODUCTIVITY.
    Agee, William K.
    Public Works, 1988, 119 (04): : 60 - 61
  • [29] SMART TEST EQUIPMENT BROADENS SCOPE OF DATA ACQUISITION
    GRIM, JE
    COMPUTER DESIGN, 1985, 24 (09): : 91 - 94
  • [30] EXAMPLES FOR USING A DIGITAL DATA-ACQUISITION EQUIPMENT
    AHLGRIMM, HJ
    GUNTHER, R
    LANDBAUFORSCHUNG VOLKENRODE, 1973, 23 (02): : 105 - 110
12345