Cross-sectional study of periodic surface structures on gallium phosphide induced by ultrashort laser pulse irradiation

被引:56
作者
Hsu, E. M. [1 ]
Crawford, T. H. R. [1 ]
Maunders, C. [2 ]
Botton, G. A. [2 ]
Haugen, H. K. [1 ,3 ]
机构
[1] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 4L7, Canada
[2] McMaster Univ, Dept Mat Sci & Engn, Hamilton, ON L8S 4L7, Canada
[3] McMaster Univ, Dept Phys & Astron, Hamilton, ON L8S 4L7, Canada
基金
加拿大创新基金会; 加拿大自然科学与工程研究理事会;
关键词
D O I
10.1063/1.2936865
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present cross-sectional transmission electron microscopy studies of laser induced periodic surface structures (LIPSS) formed on gallium phosphide after irradiation with ultrashort laser pulses with a pulse duration of 150 fs and centered at a wavelength of 800 nm. LIPSS with spatial periods (similar to 165 nm) substantially smaller than the incident wavelength are found to have vertical profiles as high as similar to 960 nm measured from the crest to the trough. The present observations provide important insights into the formation mechanisms of subwavelength LIPSS. (C) 2008 American Institute of Physics.
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页数:3
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共 31 条
[1]   Measuring pulse-front tilt in ultrashort pulses using GRENOUILLE [J].
Akturk, S ;
Kimmel, M ;
O'Shea, P ;
Trebino, R .
OPTICS EXPRESS, 2003, 11 (05) :491-501
[2]   Optically produced arrays of planar nanostructures inside fused silica [J].
Bhardwaj, VR ;
Simova, E ;
Rajeev, PP ;
Hnatovsky, C ;
Taylor, RS ;
Rayner, DM ;
Corkum, PB .
PHYSICAL REVIEW LETTERS, 2006, 96 (05)
[3]   SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS [J].
BIRNBAUM, M .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) :3688-&
[4]   Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses [J].
Bonse, J ;
Munz, M ;
Sturm, H .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (01)
[5]   Ultrashort-pulse laser ablation of indium phosphide in air [J].
Bonse, J ;
Wrobel, JM ;
Krüger, J ;
Kautek, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (01) :89-94
[6]   Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air [J].
Bonse, J ;
Sturm, H ;
Schmidt, D ;
Kautek, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (06) :657-665
[7]   Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses [J].
Borowiec, A ;
Haugen, HK .
APPLIED PHYSICS LETTERS, 2003, 82 (25) :4462-4464
[8]   Modification of dielectric surfaces with ultra-short laser pulses [J].
Costache, F ;
Henyk, M ;
Reif, J .
APPLIED SURFACE SCIENCE, 2002, 186 (1-4) :352-357
[9]   Surface patterning on insulators upon femtosecond laser ablation [J].
Costache, F ;
Henyk, M ;
Reif, J .
APPLIED SURFACE SCIENCE, 2003, 208 :486-491
[10]   Subsurface modifications in indium phosphide induced by single and multiple femtosecond laser pulses: A study on the formation of periodic ripples [J].
Couillard, M. ;
Borowiec, A. ;
Haugen, H. K. ;
Preston, J. S. ;
Griswold, E. M. ;
Botton, G. A. .
JOURNAL OF APPLIED PHYSICS, 2007, 101 (03)