Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

被引：18
作者：
Ostasevicius, Vytautas [1 ]
Gaidys, Rimvydas [2 ]
Dauksevicius, Rolanas [1 ]
机构：
[1] Kaunas Univ Technol, Inst Hitech Dev, LT-51369 Kaunas, Lithuania
[2] Kaunas Univ Technol, Fac Informat, LT-51368 Kaunas, Lithuania
来源：
SENSORS | 2009年 / 9卷 / 12期
关键词：
MEMS; vibro-impact; contact; finite element analysis; nodal points; vibration modes; SIMULATION; MECHANISMS; ADHESION;
D O I：
10.3390/s91210201
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2-D finite element model encompasses cantilever microstructures operating in a vacuum and impacting on a viscoelastic support. The presented numerical analysis focuses on the first three flexural vibration modes and their influence on dynamic characteristics. Simulation results demonstrate the possibility to use higher modes and their particular points for enhancing MEMS performance and reliability through reduction of vibro-impact process duration.
引用
收藏
页码：10201 / 10216
页数：16
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