Single-defect Photonic Crystal Cavity Laser Fabricated by a Combined Lithography of Laser Holography and Focused Ion Beam

被引：0
|
作者：
Ahn, Sungmo [1 ]
Kim, Sihan [1 ]
Jeon, Heonsu [1 ]
机构：
[1] Seoul Natl Univ, Dept Phys & Astron, Seoul 151747, South Korea
来源：
2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS) | 2010年
基金：
美国国家科学基金会;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
InP-based square-lattice photonic crystal laser with a single air-hole defect was fabricated by a combined lithography of laser holography and focused ion beam, which enables the large scale and high throughput fabrication of PC-based devices. (C)2010 Optical Society of America
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页数：2
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