Membrane-supported CPW with mounted active devices

被引：17

作者：

Liu, WY ^{[1
]}

Steenson, DP ^{[1
]}

Steer, MB ^{[1
]}

机构：

[1] Univ Leeds, Sch Elect & Comp Engn, Leeds LS2 9JT, W Yorkshire, England

来源：

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2001年 / 11卷 / 04期

关键词：

CPW; micromachining; photosensitive resin; SU-8; suspended CPW; transmission lines;

D O I：

10.1109/7260.916332

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the fabrication of printed circuit lines on a 5 mum thick membrane that minimizes dielectric loss and effectively eliminates surface modes, both of which are important for operation at millimeter-wave and submiliimeter-wave frequencies, The relatively low-cost low-temperature process uses a photosensitive resin (SU-8) to form the membrane and enables devices to be mounted on it.

引用

页码：167 / 169

页数：3

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