Numerical investigation on material removal mechanism in elliptical vibration cutting of single-crystal silicon

被引:17
作者
Liu, Changlin [1 ]
Zhang, Jianguo [1 ]
Zhang, Junjie [2 ]
Chu, Jianning [1 ]
Chen, Xiao [1 ]
Xiao, Junfeng [1 ]
Xu, Jianfeng [1 ]
机构
[1] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Wuhan 430074, Peoples R China
[2] Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Peoples R China
基金
中国国家自然科学基金;
关键词
Molecular dynamics simulation; Elliptical vibration cutting; Single-crystal silicon; Material removal mechanism; TOOL EDGE RADIUS; MONOCRYSTALLINE SILICON; PHASE-TRANSFORMATION; SURFACE GENERATION; DUCTILE TRANSITION; DIAMOND TOOLS; MODEL; PARAMETERS;
D O I
10.1016/j.mssp.2021.106019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Elliptical vibration cutting (EVC) is a promising technique for improving the cutting performance of single crystal silicon. Whereas the material removal mechanism in the tool vibration cycle has not been adequately explored. In this paper, molecular dynamics simulation is carried out via a modified model to explore the material removal mechanism in EVC of single-crystal silicon. The tool vibration amplitude and nominal depth of cut in the simulation model is remarkably increased to describe the transient material removal feature in a single vibration cycle. A model of the effective tool rake angle is established to determine the dominant material removal mechanism. Furthermore, the influence of the tool edge radii, speed ratios, and vibration amplitudes on the extrusion to shear transition is studied. The results indicate that the dominant material removal mechanism shifts from the extrusion to shear in a single vibration cycle. Besides, based on the stress analysis, the formation mechanism of the subsurface damage in extrusion and shear stage is different. Furthermore, the extrusion to shear transition can be influenced by varying the geometry and vibration parameters while the critical value of the effective tool rake angle for the extrusion to shear transition is approximately identical.
引用
收藏
页数:12
相关论文
共 50 条
[41]   Investigation on system design methodology and cutting force optimization in laser-assisted diamond machining of single-crystal silicon [J].
Ke, Jinyang ;
Fu, Yufan ;
Liu, Changlin ;
Zhang, Jianguo ;
Chen, Xiao ;
Xu, Jianfeng .
JOURNAL OF MANUFACTURING PROCESSES, 2024, 115 :1-17
[42]   Research on Cutting Mechanism of A-WEDM of Single-crystal Silicons [J].
Jia Z. ;
Li S. ;
Ma G. ;
Shao W. ;
Qiao C. ;
Zhang C. .
Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2022, 33 (20) :2459-2467
[43]   In-plane free vibration of a single-crystal silicon ring [J].
Chang, Chia-Ou ;
Chang, Guo-En ;
Chou, Chan-Shin ;
Chien, Wen-Tien Chang ;
Chen, Po-Chih .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2008, 45 (24) :6114-6132
[44]   Investigation of failure modes and material structural responses of nanographite coatings on single-crystal silicon by nanoscratching [J].
Brussel, Fabian ;
Huang, Weihai ;
Yan, Jiwang .
TRIBOLOGY INTERNATIONAL, 2024, 193
[45]   Feasibility investigation on ductile machining of single-crystal silicon for deep micro-structures by ultra-precision fly cutting [J].
Sun, Zhanwen ;
To, Suet ;
Yu, K. M. .
JOURNAL OF MANUFACTURING PROCESSES, 2019, 45 (176-187) :176-187
[46]   Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon [J].
Wang, Jiqiang ;
Geng, Yanquan ;
Li, Zihan ;
Yan, Yongda ;
Luo, Xichun ;
Fan, Pengfei .
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2022, 144 (04)
[47]   Analytical modeling of subsurface damage and material removal energy in elliptical vibration cutting of micro-structures on brittle materials [J].
Zheng, Zhengding ;
Huang, Kai ;
Lin, Chuangting ;
Huang, Weiqi ;
Zhang, Jianguo ;
Chen, Xiao ;
Xiao, Junfeng ;
Xu, Jianfeng .
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2023, 25 :5674-5692
[48]   Atomic simulation of the temperature effect on fabrication mechanism of micro-structured surface on single-crystal silicon [J].
Liu, Changlin ;
Yip, Wai Sze ;
Chen, Juan ;
Wang, Ruoxin ;
Xu, Jianfeng ;
To, Suet .
JOURNAL OF MANUFACTURING PROCESSES, 2025, 133 :238-248
[49]   Ductile-regime turning mechanism of single-crystal silicon [J].
Shibata, T ;
Fujii, S ;
Makino, E ;
Ikeda, M .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1996, 18 (2-3) :129-137
[50]   Fundamental investigation of ultra-precision ductile machining of tungsten carbide by applying elliptical vibration cutting with single crystal diamond [J].
Zhang, Jianguo ;
Suzuki, Norikazu ;
Wang, Yilong ;
Shamoto, Eiji .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2014, 214 (11) :2644-2659