Synthesis of functional diamond-like carbon nanocomposite films containing titanium dioxide nanoparticles

被引:4
作者
Chen, Kuo-Cheng [1 ]
Hong, Franklin Chau-Nan [1 ,2 ,3 ]
机构
[1] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan
[3] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan
关键词
Diamond-like carbon films; Self-cleaning; Photocatalytic; UV-induced hydrophilicity; SOURCE ION-IMPLANTATION; AMORPHOUS-CARBON; DLC-COATINGS; THIN-FILMS; DEPOSITION; CARBIDE; OXYGEN; OXIDE;
D O I
10.1016/j.tsf.2010.04.102
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Synthesis of diamond-like carbon (DLC) films with UV-induced-hydrophilicity function was studied by inductively-coupled plasma (ICP) chemical vapor deposition. Titanium tetraisopropoxide (TTIP) and oxygen gases were employed as the precursors to deposit diamond-like nanocomposite films containing titanium dioxide (TiO2) nanoparticles. X-ray diffraction and high-resolution transmission electron microscopy revealed that TiO2 nanocrystallites were formed in the DLC films when oxygen concentration was higher than TTIP concentration during deposition. The DLC nanocomposite film was hydrophobic without ultraviolet (UV) irradiation, and became highly hydrophilic under UV irradiation, exhibiting the self-cleaning effect. A very broad peak centered at 1580 cm(-1) was observed in the Raman spectra confirming the formation of DLC films. The hardness of the film was about 8 GPa with a stress of 3 GPa. ICP was essential in forming the photocatalytic TiO2 nanoparticles in the DLC matrix. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:7320 / 7323
页数:4
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