Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride

被引：15

作者：

Ladison, JL ^{[1
]}

Price, JJ ^{[1
]}

Helfinstine, JD ^{[1
]}

Rosch, WR ^{[1
]}

机构：

[1] Corning Inc, Corning, NY 14831 USA

来源：

Optical Microlithography XVIII, Pts 1-3 | 2005年 / 5754卷

关键词：

Code; 9575; calcium fluoride; CaF2; Knoop hardness; Vickers hardness; elastic modulus; nanoindentation; microindentation; Young's modulus;

D O I：

10.1117/12.601033

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Knoop and Vickers hardness, Young's Modulus, and fracture toughness measurements were performed on Coming's Code 9575 calcium fluoride in various orientations. Other commercially available sources of calcium fluoride were also measured for comparison of properties. Knoop hardness and elastic properties exhibited a dependence on orientation while no such dependence was observed for Vickers hardness and fracture toughness. The results also indicated that these physical properties were not dependent on the source of the material.

引用

页码：1329 / 1338

页数：10

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