UV Assistant Micro Injection Molding Process for High Aspect Ratio Structures-Equipment Design and Construction

被引：0

作者：

Liu, He-Feng ^{[1
]}

Liu, Hong-Bo ^{[1
]}

Wu, Wang-Qing ^{[2
]}

Xie, Lei ^{[1
]}

Li, Di-Chen ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710054, Peoples R China

[2] Tech Univ Clausthal, Inst Polymer Mat & Plast Engn, D-38678 Clausthal Zellerfeld, Germany

来源：

INTERNATIONAL CONFERENCE ON MECHANICS AND MATERIALS ENGINEERING (ICMME 2014) | 2014年

关键词：

micro injection molding; UV curing; high aspect ratio; micro structures; THERMOPLASTIC POLYMERS;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

High aspect ratio structures are getting more and more attentions with the development of MEMS, MOEMS, bio-MEMS[1], etc. Today micro injection molding for thermoplastics is one most popular technology for the high aspect ratio micro structures[2,3]. However, due to the relative high viscosity of the polymer melts and the high adhesive force between the microstructure and the mold, ultra high aspect ratio micro structure are very difficult and expensive produced by traditional micro injection molding[4]. In this study, the UV curing polymer with extremely low viscosity combined with micro injection molding process was developed and applied for the high aspect ratio micro structure fabrication. With the presented UV assistant micro injection molding device, the lower viscosity of the UV curable resin make higher aspect ratio micro structures able to be formed in the cost efficient way. The main units and construction design of this UV assistant micro injection molding equipment are dedicated in detail and explained for its application for high aspect ratio micro structures fabrication.

引用

页码：121 / 126

页数：6

共 32 条

[1] Plastic injection molding of high-aspect ratio micro-rods
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MATERIALS AND MANUFACTURING PROCESSES, 2006, 21 (08) : 824 - 831
[2] Characterization of the micro injection-compression molding process for the replication of high aspect ratio micro-structured surfaces
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Marco Sorgato
Giovanni Lucchetta
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[3] Injection molding of polymer micro- and sub-micron structures with high-aspect ratios
Liou, AC
Chen, RH
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2006, 28 (11-12): : 1097 - 1103
[4] Injection molding of polymer micro- and sub-micron structures with high-aspect ratios
A.-C. Liou
R.-H. Chen
The International Journal of Advanced Manufacturing Technology, 2006, 28 : 1097 - 1103
[5] High aspect ratio structuring by ICP etching and micro Metals and Ceramics micro forming with powder injection Molding
Murakoshi, Y
Shimizu, T
Maeda, R
Sano, T
MICRO MATERIALS, PROCEEDINGS, 2000, : 1223 - 1224
[6] The Evaluation of Vacuum Venting and Variotherm Process for Improving the Replication by Injection Molding of High Aspect Ratio Micro Features for Biomedical Application
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[7] High aspect ratio PMMA micro-structures fabricated by RIE
Yu, AB
Ding, GF
Yang, CS
Li, CM
Mao, HP
Ni, ZP
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, 2001, 4601 : 278 - 283
[8] High precision validation of micro injection molding process simulations
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Costa, F. S.
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[9] Filling of high aspect ratio micro features of a microfluidic flow cytometer chip using micro injection moulding
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[10] Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe
M. Yamamoto
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