Optical properties and thermal stability of amorphous Ge-Sb-Se films

被引：11

作者：

Teng, Nana ^{[1
,2
]}

Qin, Jingshuang ^{[1
,2
]}

Chen, Yimin ^{[1
,2
,3
]}

Wang, Rongping ^{[1
,2
]}

Shen, Xiang ^{[1
,2
]}

Xu, Tiefeng ^{[1
,2
]}

机构：

[1] Ningbo Univ, Adv Technol Res Inst, Lab Infrared Mat & Devices, Ningbo 315211, Zhejiang, Peoples R China

[2] Ningbo Univ, Adv Technol Res Inst, Key Lab Photoelect Mat & Devices Zhejiang Prov, Ningbo 315211, Zhejiang, Peoples R China

[3] Ningbo Univ, Sch Phys Sci & Technol, Dept Microelect Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2020年 / 532卷 / 532期

关键词：

Chalcogenide films; Thermal stability; Refractive index; Ge-Sb-Se; CHALCOGENIDE GLASSES; REFRACTIVE-INDEX;

D O I：

10.1016/j.jnoncrysol.2020.119888

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ge-Sb-Se chalcogenide films with mean coordination number (MCN) from 2.27 to 2.66 were deposited by magnetron sputtering method. Annealing time dependent physical properties, such as refractive index, optical band gap, and thickness were investigated. It was found that, the Ge15Sb9.6Se75.4 film with MCN is 2.4 exhibits the smallest change ratio after long time (35 h) heat annealing in refractive index (<1%), optical band gap (<1%), and thickness (<3%). Together with the analysis of topological model, the component of Ge15Sb9.Se-6(75).(4) with MCN is 2.4 can be considered as the best thermal stable film in this Ge-Sb-Se system. The film with larger refractive index of similar to 2.7 is very helpful to the application like chalcogenide waveguide.

引用

收藏

页数：5

相关论文

共 50 条

[41] Thickness dependence of the optical properties of amorphous As-Ge-S thin films [J].

Todorov, R. ;

Lalova, A. ;

Tasseva, J. .

BULGARIAN CHEMICAL COMMUNICATIONS, 2013, 45 :38-42

[42] Optical Properties of Bi Doped Amorphous Se-Te Thin Films [J].

Kumar, Anup ;

Heera, Pawan ;

Barman, P. B. ;

Sharma, Raman .

INTERNATIONAL CONFERENCE ON ADVANCES IN CONDENSED AND NANO MATERIALS (ICACNM-2011), 2011, 1393

[43] Structural and optical properties of thermally evaporated Sb doped Ge-Se thin films [J].

Al-Agel, F. A. .

OPTICS AND LASER TECHNOLOGY, 2013, 54 :208-213

[44] Effects of chemical composition and mean coordination number on glass transitions in Ge-Sb-Se glasses [J].

Wei, Wen-Hou .

MODERN PHYSICS LETTERS B, 2017, 31 (36)

[45] EFFECT OF SWIFT HEAVY ION IRRADIATION ON OPTICAL AND STRUCTURAL PROPERTIES OF AMORPHOUS Ge-As-Se THIN FILMS [J].

Chauhan, Rashmi ;

Tripathi, Arvind ;

Srivastava, Amit Kumar ;

Srivastava, Krishna Kant .

CHALCOGENIDE LETTERS, 2013, 10 (02) :63-71

[46] X-ray photoelectron spectroscopy analysis of Ge-Sb-Se pulsed laser deposited thin films [J].

Baudet, Emeline ;

Cardinaud, Christophe ;

Boidin, Remi ;

Girard, Aurelie ;

Gutwirth, Jan ;

Nemec, Petr ;

Nazabal, Virginie .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2018, 101 (08) :3347-3356

[47] Fabrication and Description of Amorphous Ge33Se47Sn20 Films for Optical Applications [J].

Hassanien, A. M. ;

Darwish, A. A. A. ;

Qashou, Saleem I. ;

Atta, A. A. ;

Altalhi, Tariq A. .

JOURNAL OF ELECTRONIC MATERIALS, 2023, 52 (07) :4495-4502

[48] COMPOSITIONAL DEPENDENCE OF HARDNESS OF Ge-Sb-Se GLASS FOR MOLDED LENS APPLICATIONS [J].

Park, J. K. ;

Lee, J. H. ;

Shin, S. Y. ;

Yi, J. H. ;

Lee, W. H. ;

Park, B. J. ;

Choi, J. H. ;

Kim, N. Y. ;

Choi, Y. G. .

ARCHIVES OF METALLURGY AND MATERIALS, 2015, 60 (02) :1205-1208

[49] Structure and optical properties of amorphous Ge-Se films prepared by pulsed laser deposition [J].

Pan, R. K. ;

Tao, H. Z. ;

Wang, J. Z. ;

Wang, J. Y. ;

Chu, H. F. ;

Zhang, T. J. ;

Wang, D. F. ;

Zhao, X. J. .

OPTIK, 2013, 124 (21) :4943-4946

[50] Ultrabroad supercontinuum generated from a highly nonlinear Ge-Sb-Se fiber [J].

Ou, Hongya ;

Dai, Shixun ;

Zhang, Peiqing ;

Liu, Zijun ;

Wang, Xunsi ;

Chen, Feifei ;

Xu, Hang ;

Luo, Baohua ;

Huang, Yicong ;

Wang, Rongping .

OPTICS LETTERS, 2016, 41 (14) :3201-3204

← 1 2 3 4 5 →