Optical properties and thermal stability of amorphous Ge-Sb-Se films

被引：11

作者：

Teng, Nana ^{[1
,2
]}

Qin, Jingshuang ^{[1
,2
]}

Chen, Yimin ^{[1
,2
,3
]}

Wang, Rongping ^{[1
,2
]}

Shen, Xiang ^{[1
,2
]}

Xu, Tiefeng ^{[1
,2
]}

机构：

[1] Ningbo Univ, Adv Technol Res Inst, Lab Infrared Mat & Devices, Ningbo 315211, Zhejiang, Peoples R China

[2] Ningbo Univ, Adv Technol Res Inst, Key Lab Photoelect Mat & Devices Zhejiang Prov, Ningbo 315211, Zhejiang, Peoples R China

[3] Ningbo Univ, Sch Phys Sci & Technol, Dept Microelect Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2020年 / 532卷 / 532期

关键词：

Chalcogenide films; Thermal stability; Refractive index; Ge-Sb-Se; CHALCOGENIDE GLASSES; REFRACTIVE-INDEX;

D O I：

10.1016/j.jnoncrysol.2020.119888

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ge-Sb-Se chalcogenide films with mean coordination number (MCN) from 2.27 to 2.66 were deposited by magnetron sputtering method. Annealing time dependent physical properties, such as refractive index, optical band gap, and thickness were investigated. It was found that, the Ge15Sb9.6Se75.4 film with MCN is 2.4 exhibits the smallest change ratio after long time (35 h) heat annealing in refractive index (<1%), optical band gap (<1%), and thickness (<3%). Together with the analysis of topological model, the component of Ge15Sb9.Se-6(75).(4) with MCN is 2.4 can be considered as the best thermal stable film in this Ge-Sb-Se system. The film with larger refractive index of similar to 2.7 is very helpful to the application like chalcogenide waveguide.

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页数：5

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