Optical properties and thermal stability of amorphous Ge-Sb-Se films

被引：11

作者：

Teng, Nana ^{[1
,2
]}

Qin, Jingshuang ^{[1
,2
]}

Chen, Yimin ^{[1
,2
,3
]}

Wang, Rongping ^{[1
,2
]}

Shen, Xiang ^{[1
,2
]}

Xu, Tiefeng ^{[1
,2
]}

机构：

[1] Ningbo Univ, Adv Technol Res Inst, Lab Infrared Mat & Devices, Ningbo 315211, Zhejiang, Peoples R China

[2] Ningbo Univ, Adv Technol Res Inst, Key Lab Photoelect Mat & Devices Zhejiang Prov, Ningbo 315211, Zhejiang, Peoples R China

[3] Ningbo Univ, Sch Phys Sci & Technol, Dept Microelect Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2020年 / 532卷

关键词：

Chalcogenide films; Thermal stability; Refractive index; Ge-Sb-Se; CHALCOGENIDE GLASSES; REFRACTIVE-INDEX;

D O I：

10.1016/j.jnoncrysol.2020.119888

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ge-Sb-Se chalcogenide films with mean coordination number (MCN) from 2.27 to 2.66 were deposited by magnetron sputtering method. Annealing time dependent physical properties, such as refractive index, optical band gap, and thickness were investigated. It was found that, the Ge15Sb9.6Se75.4 film with MCN is 2.4 exhibits the smallest change ratio after long time (35 h) heat annealing in refractive index (<1%), optical band gap (<1%), and thickness (<3%). Together with the analysis of topological model, the component of Ge15Sb9.Se-6(75).(4) with MCN is 2.4 can be considered as the best thermal stable film in this Ge-Sb-Se system. The film with larger refractive index of similar to 2.7 is very helpful to the application like chalcogenide waveguide.

引用

页数：5

共 50 条

[21] Chalcogenide Ge-Sb-Se Optical and Crystallization Characteristics for Basic a Planning Aspheric Lens [J].

Myung, Tae Sik ;

Ko, Jun Bin .

Korean Journal of Materials Research, 2016, 26 (11) :598-603

[22] Effect of chemical composition on the structure, optical properties and femtosecond laser ablation performance of Ge-Sb-Se glasses [J].

Long, Nengbing ;

Xia, Mengling ;

Zhang, Peiqing ;

Nie, Qiuhua ;

Xu, Yinsheng .

JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 779 :543-549

[23] Effect of Ge-rich Ga-Ge-Sb-Se glass composition on the optical and thermal properties [J].

Karaksina, E., V ;

Shiryaev, V. S. ;

Filatov, A., I ;

Plekhovich, A. D. ;

Stepanov, B. S. ;

Kurganova, A. E. ;

Nezhdanov, A., V ;

Sidorenko, K., V .

OPTICAL MATERIALS, 2020, 104

[24] Effect of antimony (Sb) addition on the linear and non-linear optical properties of amorphous Ge-Te-Sb thin films [J].

Kumar, P. ;

Kaur, J. ;

Tripathi, S. K. ;

Sharma, I. .

INDIAN JOURNAL OF PHYSICS, 2017, 91 (12) :1503-1511

[25] Compositional dependence of crystallization in Ge-Sb-Se glasses relevant to optical fiber making [J].

Parnell, Harriet ;

Furniss, David ;

Tang, Zhuoqi ;

Neate, Nigel C. ;

Benson, Trevor M. ;

Seddon, Angela B. .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2018, 101 (01) :208-219

[26] Ge-Sb-Se glass fiber-optics for in-vivo mid-infrared optical biopsy [J].

Parnell, H. ;

Butterworth, J. H. ;

Sakr, H. ;

Tang, Z. ;

Furniss, D. ;

Benson, T. M. ;

Scotchford, C. ;

Seddon, A. B. .

OPTICAL BIOPSY XIV: TOWARD REAL-TIME SPECTROSCOPIC IMAGING AND DIAGNOSIS, 2016, 9703

[27] Effect of In incorporation on optical properties of amorphous Se-Ge thin films [J].

Pandey, V. ;

Tripathi, S. K. ;

Kumar, A. .

PHYSICA B-CONDENSED MATTER, 2007, 388 (1-2) :200-205

[28] On the properties and stability of thermally evaporated Ge-As-Se thin films [J].

Bulla, D. A. P. ;

Wang, R. P. ;

Prasad, A. ;

Rode, A. V. ;

Madden, S. J. ;

Luther-Davies, B. .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2009, 96 (03) :615-625

[29] Extended Study on Crystal Growth and Viscosity in Ge-Sb-Se Bulk Glasses and Thin Films [J].

Martinkova, Simona ;

Bartak, Jaroslav ;

Kostal, Petr ;

Malek, Jiri ;

Segawa, Hiroyo .

JOURNAL OF PHYSICAL CHEMISTRY B, 2017, 121 (33) :7978-7986

[30] Effect of Ge concentration on optical properties of films synthesized by vacuum-thermal evaporation of glassy Ge-Se alloys [J].

Aleksandrovich, Elena V. ;

Aleksandrovich, Aleksandr N. ;

Mikheev, Konstantin G. ;

Mikheev, Gennady M. .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2023, 616

← 1 2 3 4 5 →