Single shot femtosecond laser nano-ablation of CVD monolayer graphene

被引：17

作者：

Gil-Villalba, A. ^{[1
]}

Meyer, R. ^{[1
]}

Giust, R. ^{[1
]}

Rapp, L. ^{[1
]}

Billet, C. ^{[1
]}

Courvoisier, F. ^{[1
]}

机构：

[1] Univ Bourgogne Franche Comte, FEMTO ST Inst, CNRS, 15B Ave Montboucons, F-25030 Besancon, France

来源：

SCIENTIFIC REPORTS | 2018年 / 8卷

基金：

欧洲研究理事会;

关键词：

BESSEL;

D O I：

10.1038/s41598-018-32957-3

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We investigate ablation of CVD monolayer graphene by femtosecond pulses in the single shot regime. We show that the ablation probability of flat graphene drastically reduces for small illumination diameters even if the ablation threshold is exceeded. However, the presence of graphene wrinkles enhances the ablation probability. This is interpreted in terms of electron and energy diffusion within the graphene layer. This differentiated behavior is a drawback for single shot laser nanopatterning. The morphology of the holes with minimal diameter depends on the fluence distribution at ablation threshold. Strong fluence gradients due to strong focussing produce an explosive folding of graphene during ablation.

引用

页数：6

共 24 条

[1] Local conductance measurement of graphene layer using conductive atomic force microscopy [J].

Ahmad, Muneer ;

Han, Sang A. ;

Tien, D. Hoang ;

Jung, Jongwan ;

Seo, Yongho .

JOURNAL OF APPLIED PHYSICS, 2011, 110 (05)

[2] High aspect ratio nanochannel machining using single shot femtosecond Bessel beams [J].

Bhuyan, M. K. ;

Courvoisier, F. ;

Lacourt, P. A. ;

Jacquot, M. ;

Salut, R. ;

Furfaro, L. ;

Dudley, J. M. .

APPLIED PHYSICS LETTERS, 2010, 97 (08)

[3]

Bonaccorso F, 2010, NAT PHOTONICS, V4, P611, DOI [10.1038/nphoton.2010.186, 10.1038/NPHOTON.2010.186]

[4] Surface nanoprocessing with nondiffracting femtosecond Bessel beams [J].

Courvoisier, F. ;

Lacourt, P. -A. ;

Jacquot, M. ;

Bhuyan, M. K. ;

Furfaro, L. ;

Dudley, J. M. .

OPTICS LETTERS, 2009, 34 (20) :3163-3165

[5] Quantifying pulsed laser induced damage to graphene [J].

Currie, Marc ;

Caldwell, Joshua D. ;

Bezares, Francisco J. ;

Robinson, Jeremy ;

Anderson, Travis ;

Chun, Hayden ;

Tadjer, Marko .

APPLIED PHYSICS LETTERS, 2011, 99 (21)

[6] Bessel and annular beams for materials processing [J].

Duocastella, Marti ;

Arnold, Craig B. .

LASER & PHOTONICS REVIEWS, 2012, 6 (05) :607-621

[7] Spatiotemporal structure of femtosecond Bessel beams from spatial light modulators [J].

Froehly, L. ;

Jacquot, M. ;

Lacourt, P. A. ;

Dudley, J. M. ;

Courvoisier, F. .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2014, 31 (04) :790-793

[8] Deviation from threshold model in ultrafast laser ablation of graphene at sub-micron scale [J].

Gil-Villalba, A. ;

Xie, C. ;

Salut, R. ;

Furfaro, L. ;

Giust, R. ;

Jacquot, M. ;

Lacourt, P. A. ;

Dudley, J. M. ;

Courvoisier, F. .

APPLIED PHYSICS LETTERS, 2015, 107 (06)

[9] FIB patterning of dielectric, metallized and graphene membranes: A comparative study [J].

Hemamouche, A. ;

Morin, A. ;

Bourhis, E. ;

Toury, B. ;

Tarnaud, E. ;

Mathe, J. ;

Guegan, P. ;

Madouri, A. ;

Lafosse, X. ;

Ulysse, C. ;

Gullet, S. ;

Patriarche, G. ;

Auvray, L. ;

Montel, F. ;

Wilmart, Q. ;

Placais, B. ;

Yates, J. ;

Gierak, J. .

MICROELECTRONIC ENGINEERING, 2014, 121 :87-91

[10] Optics at critical intensity:: Applications to nanomorphing [J].

Joglekar, AP ;

Liu, HH ;

Meyhöfer, E ;

Mourou, G ;

Hunt, AJ .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2004, 101 (16) :5856-5861

← 1 2 3 →