MOCVD growth and properties of ZnO and Zn1-xMgxO films

被引：2

作者：

Zheng, YD ^{[1
]}

Gu, SL ^{[1
]}

Ye, JD ^{[1
]}

Liu, W ^{[1
]}

Zhu, SM ^{[1
]}

机构：

[1] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China

来源：

PROCEEDINGS OF THE SIXTH CHINESE OPTOELECTRONICS SYMPOSIUM | 2003年

关键词：

D O I：

10.1109/COS.2003.1278155

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, the high-quality ZnO based films were epitaxially deposited by low-pressure metal organic chemical vapor deposition (LP-MOCVD) technique. The characteristics of ZnO films were studied as a function of the growth conditions such as the growth temperatures, and the flow ratio of II/VI, which dramatically affect the structure and the associated optical properties of the epilayer. The spontaneous emission spectrum measured at the low temperature of 4K shows an emission peak related to donor-bound exciton at the full width of 2nm, indicating rather high-quality of the ZnO epilayer obtained by optimizing the above growth conditions. The Zn1-xMgxO alloy thin film has been grown with the incorporation of Mg at a maximum value of x=0.22. The structure and optical properties of Zn1-xMgxO alloy thin film has then been discussed briefly.

引用

页码：19 / 22

页数：4

共 50 条

[21] The Growth Control of Zn1-xMgxO Films and Photo-Electrical Property Research [J].

Wang, Xiaoheng ;

Zhou, Xiang ;

Zhang, Guang .

PROCEEDINGS OF THE 2014 INTERNATIONAL CONFERENCE ON MATERIALS SCIENCE AND ENERGY ENGINEERING (CMSEE 2014), 2015, :320-326

[22] Structural, electrical and optical properties of transparent Zn1-xMgxO nanocomposite thin films [J].

Kaushal, Ajay ;

Pathak, Dinesh ;

Bedi, R. K. ;

Kaur, Davinder .

THIN SOLID FILMS, 2009, 518 (05) :1394-1398

[23] Zn1-xMgxO thin films deposited by spray pyrolysis [J].

Sahal, M. ;

Mari, B. ;

Mollar, M. ;

Manjon, F. J. .

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 9, 2010, 7 (09)

[24] Structural and optical properties of Zn1-xMgxO films grown by pulsed laser deposition [J].

Krishnaprasad, P. S. ;

Ragitha, E. K. ;

Jayaraj, M. K. .

ADVANCES IN THIN-FILM COATINGS FOR OPTICAL APPLICATIONS V, 2008, 7067

[25] Growth of Zn1-xMgxO films with single wurtzite structure by MOCVD process and their application to Cu(InGa)(SSe)2 solar cells [J].

Meng, F. Y. ;

Chiba, Y. ;

Yamada, A. ;

Konagai, M. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2007, 91 (20) :1887-1891

[26] Photoluminescence and structure properties of Zn1-xMgxO films grown by RF magnetron sputtering [J].

Xu, XL ;

Lu, L ;

Wang, Y ;

Shi, CS .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2006, 18 (04) :1189-1196

[27] Effect of annealing and Mg content on the microstructure and optical properties of Zn1-xMgxO films [J].

Zhou Jun ;

Fang Qing-Qing ;

Wang Bao-Ming ;

Liu Yan-Mei ;

Li Mao ;

Yan Fang-Liang ;

Wang Sheng-Nan .

ACTA PHYSICA SINICA, 2008, 57 (10) :6614-6619

[28] Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate [J].

Kang, TD ;

Lee, H ;

Park, WI ;

Yi, GC .

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2004, 44 (01) :129-132

[29] Hydrothermal growth and photoluminescence of Zn1-xMgxO alloy crystals [J].

Wang, Buguo ;

Callahan, M. J. ;

Bouthillette, L. O. .

CRYSTAL GROWTH & DESIGN, 2006, 6 (06) :1256-1260

[30] Optical and structural properties of Zn1-xMgxO ceramic materials [J].

Othman, Zayani Jaafar ;

Matoussi, Adel ;

Fabbri, Filippo ;

Rossi, Francesca ;

Salviati, Giancarlo .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2014, 116 (03) :1501-1509

← 1 2 3 4 5 →