Size control of silver nanoclusters during ion-assisted pulse-plasma deposition of carbon-silver composite thin films

被引：12

作者：

Streletskiy, O. A. ^{[1
]}

Zavidovskiy, I. A. ^{[1
]}

Nischak, O. Yu. ^{[1
]}

Haidarov, A. A. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Dept Phys, Leninskie Gory 1, Moscow 119991, Russia

来源：

VACUUM | 2020年 / 175卷

关键词：

Pulse-plasma sputtering; Carbon-silver composite films; Silver nanoclusters; Optical transmission spectroscopy; X-ray photoelectron spectroscopy; Transmission electron spectroscopy; DIAMOND-LIKE CARBON; ENHANCED RAMAN-SCATTERING; OPTICAL-PROPERTIES; AG NANOPARTICLES; SURFACE; MICROSTRUCTURE; OXIDATION; COATINGS; RESONANCE; NITROGEN;

D O I：

10.1016/j.vacuum.2020.109286

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present an investigation of carbon-silver composite thin films obtained by ion-assisted pulse-plasma sputtering of graphite cathode with silver inclusions. Transmission electron microscopy, X-ray photoelectron spectroscopy were used to analyze the films structural properties. It was shown that the films consist of amorphous carbon matrix and silver nanoclusters. The increase of assisting ions energy from 0 eV to 300 eV resulted in decrease of silver nanoclusters average size and their number density increase. Variation of the films extinction spectra with deposition parameters change was studied.

引用

页数：6

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