On the dielectric properties of dc magnetron TiO2 thin films

被引：104

作者：

Stamate, MD ^{[1
]}

机构：

[1] Bacau Univ, Dept Phys, Bacau 5500, Romania

来源：

APPLIED SURFACE SCIENCE | 2003年 / 218卷 / 1-4期

关键词：

TiO2; magnetron; thin films; dielectric properties;

D O I：

10.1016/S0169-4332(03)00624-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

TiO2 magnetron sputtered thin films were used for preparation of metal-oxide-metal (MOM), aluminum-TiO2-aluminum. We have analyzed the electrical polarization and frequency dependent effect for the electric capacitance and dielectric loss for TiO2-based structures. We have found that there is a strong dependence of TiO2 dielectric constant with the electric field intensity and signal frequency. We have found that the dielectric properties have weak dependencies of thickness for amorphous TiO2 thin films. (C) 2003 Elsevier B.V. All rights reserved.

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页码：317 / 322

页数：6

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