Faults detection approach for self-testable RF MEMS

被引：4

作者：

Islam, Syed Zahidul ^{[1
]}

Wong, Wallace ^{[1
]}

Tiong, Su Hieng ^{[1
]}

Ali, Mohd Alauddin Mohd ^{[2
]}

机构：

[1] Swinburne Univ Technol, Sarawak Campus, Jalan Simpang Tiga, Kuching Sarawak, Malaysia

[2] UKM, Bangi, Malaysia

来源：

2006 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS | 2006年

关键词：

D O I：

10.1109/SMELEC.2006.381075

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Efficient built-in or external test strategies are becoming essential in Micro-Electromechanical systems (MEMS), especially for high reliability and safety critical applications. This paper describes self-testable and self-reparable RF MEMS fault testing approach. Simulation results show the effects of switches faults in MEMS.

引用

页码：329 / +

页数：2

共 16 条

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