Novel LTPS technology for large substrate

被引：11
|
作者：
Nodera, Nobutake [1 ]
Utsugi, Satoru [1 ]
Ishida, Shigeru [1 ]
Takakura, Ryohei [1 ]
Matsushima, Yoshiaki [1 ]
Michinaka, Satoshi [1 ]
Matsumoto, Takao [1 ]
Kobayashi, Kazuki [2 ]
Oketani, Taimi [3 ]
机构：
[1] Sakai Display Prod Corp, Corp Res & Dev Grp, Dev Ctr, Dev Dept 1, Sakai, Osaka, Japan
[2] Sakai Display Prod Corp, Corp Res & Dev Grp, Sakai, Osaka, Japan
[3] Sakai Display Prod Corp, Sakai, Osaka, Japan
来源：
JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY | 2016年 / 24卷 / 06期
关键词：
LTPS; TFT; poly-Si; laser anneal; Gen10; POLY-SI TFTS; FABRICATION;
D O I：
10.1002/jsid.455
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We developed partial laser anneal silicon (PLAS) thin-film transistor (TFT) of novel low-temperature polycrystalline-silicon (LTPS) technology, which had the mobility of 28.1 cm(2)/Vs lager than that of mass produced oxide TFT and photo-stability comparable with that of LTPS TFT in bottom gate structure. This innovative technology enables the conversion from an alpha-Si TFT to a high-mobility TFT most easily and inexpensively. Moreover, there is no limit of substrate size, such as Gen10 and more. Photo-stability of PLAS will be suitable to organic light-emitting diode backplane, high-dynamic range TV, and outdoor IDP.
引用
收藏
页码：394 / 401
页数：8
相关论文
共 50 条
  • [1] Wireless Communication with RFID on LTPS Substrate
    Yamashita, Keitaro
    Kawata, Satoshi
    IDW'11: PROCEEDINGS OF THE 18TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2011, : 1675 - 1676
  • [2] Present and Future of LTPS Technology
    Kaneko, Toshiki
    Nakamura, Takashi
    Kimura, Hiroyuki
    THIN FILM TRANSISTORS 13 (TFT 13), 2016, 75 (10): : 3 - 12
  • [3] LTPS technology for improving the uniformity of AMOLEDs
    Hong, Soon-Kwang
    Kim, Byeong-Koo
    Ha, Yong-Min
    2007 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXVIII, BOOKS I AND II, 2007, 38 : 1366 - 1369
  • [4] LTPS TFT Process on Polyimide Substrate for Flexible AMOLED
    Gao, Xiaoyu
    Lin, Li
    Liu, Yucheng
    Huang, Xiuqi
    JOURNAL OF DISPLAY TECHNOLOGY, 2015, 11 (08): : 666 - 669
  • [5] A robust gate driver using LTPS Technology
    Lin, Jan-Ruei
    Liu, Chang-Ho
    Lin, Chang-Cheng
    Lee, Yu-Lin
    Kung, Chen-Pang
    Chen, Min-Dow
    Sheu, Shyh-Shyuan
    IDMC 05: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2005, 2005, : 479 - 482
  • [6] A Novel LTPS TFT Pixel Circuit for Compensating IR Drop of Large Area AMOLED Display
    Lee, Soo-Yeon
    Kuk, Seung-Hee
    Song, Seung-Min
    Song, Moon-Kyu
    Han, Min-Koo
    THIN FILM TRANSISTORS 11 (TFT 11), 2012, 50 (08): : 269 - 275
  • [7] LTPS TFT Technology on Flexible Substrates for Sensor Applications
    Fortunato, G.
    Maiolo, L.
    Maita, F.
    Minotti, A.
    Mirabella, S.
    Strano, V.
    Metta, G.
    Ricci, D.
    Pecora, A.
    2014 21ST INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD), 2014, : 311 - 314
  • [8] Excimer Laser Annealing for LTPS on Large Glass Substrates
    Paetzel, Rainer
    2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2015,
  • [9] A novel structure of LTPS PMOS process for AMLCD
    Chen, Yi-Wei
    Chen, Ming-Yan
    Liao, Ying-Chi
    Chiu, Ta-Wei
    Hsieh, Hsiu-Chun
    Lin, Kun-Chih
    Gan, Feng-Yuan
    IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2007, : 1869 - 1871
  • [10] Analysis of the transient body effect model for an LTPS TFT on a plastic substrate
    Choi, Yunyeong
    Lee, Taekyeong
    Park, Jisun
    Shin, Hyungsoon
    SOLID-STATE ELECTRONICS, 2021, 175
12345