Using the impact test and finite element simulation, the failure behavior of the Mo-modified layer on pure Ti was investigated. In the impact test, four loads of 100, 300, 500, and 700 N and 10(4) impacts were adopted. The three-dimensional residual impact dents were examined using an optical microscope (Olympus-DSX500i), indicating that the impact resistance of the Ti surface was improved. Two failure modes cohesive and wearing were elucidated by electron backscatter diffraction and energy-dispersive spectrometer performed in a field-emission scanning electron microscope. Through finite element forward analysis performed at a typical impact load of 300 N, stress-strain distributions in the Mo-modified Ti were quantitatively determined. In addition, the failure behavior of the Mo-modified layer was determined and an ideal failure model was proposed for high-load impact, based on the experimental and finite element forward analysis results.