The density of interface states and their relaxation times in Au/Bi4Ti3O12/SiO2/n-Si(MFIS) structures

被引:33
作者
Bulbul, M. M. [1 ]
Altindal, S. [1 ]
Parlakturk, F. [1 ]
Tataroglu, A. [1 ]
机构
[1] Gazi Univ, Dept Phys, Fac Arts & Sci, TR-06500 Ankara, Turkey
关键词
MFIS structure; admittance measurements; frequency dependence; interface states; relaxation time; DEPENDENT SERIES RESISTANCE; SI-SIO2; INTERFACE; CAPACITANCE MEASUREMENTS; THIN-FILMS; DIODES; PROFILE;
D O I
10.1002/sia.3749
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Bismuth titanate (Bi4Ti3O12) (BTO) thin films were fabricated on an n-type Si substrate and annealed by rapid thermal annealing methods. The I-V measurement shows that the device has properties of Schottky diode with the Phi(B0) of 0.76 eV, n of 2.42, and leakage current of about 10(-7) A at -8 V. The experimental C-V-f and G/w-V-f characteristics of metal-ferroelectric-insulator-semiconductor (MFIS) structures show fairly large frequency dispersion especially at low frequencies due to interface states N-ss. The energy distribution of (N-ss) has been determined by using the high-low frequency capacitance (C-HF-C-LF) and conductance method. The relaxation time (tau) of interface states was calculated from the conductance method. It has been shown that both the N-ss and relaxation time increase almost exponentially with bias, which activates traps located at deeper gap energies. Copyright (C) 2011 John Wiley & Sons, Ltd.
引用
收藏
页码:1561 / 1565
页数:5
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