Directed Assembly of Non-equilibrium ABA Triblock Copolymer Morphologies on Nanopatterned Substrates

被引:54
|
作者
Ji, Shengxiang [1 ]
Nagpal, Umang [2 ]
Liu, Guoliang [2 ]
Delcambre, Sean P. [2 ]
Mueller, Marcus [3 ]
de Pablo, Juan J. [2 ]
Nealey, Paul F. [2 ]
机构
[1] Chinese Acad Sci, Changchun Inst Appl Chem, Key Lab Polymer Ecomat, Changchun 130022, Peoples R China
[2] Univ Wisconsin, Dept Chem & Biol Engn, Madison, WI 53706 USA
[3] Univ Gottingen, Inst Theoret Phys, D-37073 Gottingen, Germany
基金
中国国家自然科学基金; 美国国家科学基金会;
关键词
triblock copolymer; block copolymer lithography; directed assembly; thin film; simulation; DEVICE-ORIENTED STRUCTURES; ORDER-DISORDER TRANSITION; BIT-PATTERNED MEDIA; BLOCK-COPOLYMER; THIN-FILMS; DENSITY MULTIPLICATION; MICROPHASE-SEPARATION; HOMOPOLYMER BLENDS; MULTIBLOCK COPOLYMERS; GENERALIZED-APPROACH;
D O I
10.1021/nn301306v
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The majority of past work on directed assembly of block copolymers on chemically nanopatterned surfaces (or chemical patterns) has focused on AB diblock copolymers, and the resulting morphologies have generally corresponded to equilibrium states. Here we report a study on directed assembly of ABA triblock copolymers. Directed assembly of thin films of symmetric poly(methyl methacrylate-b-styrene-b-methyl methacrylate) (PMMA-b-PS-b-PMMA) triblock copolymers is shown to be capable of achieving a high degree of perfection, registration, and accuracy on striped patterns having periods, L-s,L- commensurate with the bulk period of the copolymer, L-o. When L-s is incommensurate with L-o, the triblock copolymer domains can reach dimensions up to 55% larger or 13% smaller than L-o. The range over which triblock copolymers tolerate departures from a commensurate L-s is significantly larger than that accessible with the corresponding diblock copolymer material on analogous directed assembly systems. The assembly kinetics of the triblock copolymer is approximately 3 orders of magnitude slower than observed in the diblock system. Theoretically informed simulations are used to interpret our experimental observations; a thermodynamic analysis reveals that triblocks can form highly ordered, non-equilibrium metastable structures that do not arise in the diblock.
引用
收藏
页码:5440 / 5448
页数:9
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