Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

被引：15
作者：
Na, KH
Kim, YS
Kang, CJ
机构：
[1] Myongji Univ, Dept Phys, Yongin 449728, Gyeonggido, South Korea
[2] Myongji Univ, Nanobio Res Ctr, Yongin 449728, Gyeonggido, South Korea
[3] Myongji Univ, Dept Elect Engn, Yongin 449728, Gyeonggido, South Korea
来源：
ULTRAMICROSCOPY | 2005年 / 105卷 / 1-4期
关键词：
microcantilever; piezoresistive; surface inicromachining; biosensor;
D O I：
10.1016/j.ultramic.2005.06.040
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：223 / 227
页数：5
相关论文
共 10 条
[1]   Development of nanomechanical biosensors for detection of the pesticide DDT [J].
Alvarez, M ;
Calle, A ;
Tamayo, J ;
Lechuga, LM ;
Abad, A ;
Montoya, A .
BIOSENSORS & BIOELECTRONICS, 2003, 18 (5-6) :649-653
[2]   Surface stress in the self-assembly of alkanethiols on gold [J].
Berger, R ;
Delamarche, E ;
Lang, HP ;
Gerber, C ;
Gimzewski, JK ;
Meyer, E ;
Guntherodt, HJ .
SCIENCE, 1997, 276 (5321) :2021-2024
[3]   Gold Nano-Structures for Transduction of Biomolecular Interactions into Micrometer Scale Movements [J].
Lavrik, Nickolay V. ;
Tipple, Christopher A. ;
Sepaniak, Michael J. ;
Datskos, Panos G. .
BIOMEDICAL MICRODEVICES, 2001, 3 (01) :35-44
[4]   Microcantilever-based biosensors [J].
Moulin, AM ;
O'Shea, SJ ;
Welland, ME .
ULTRAMICROSCOPY, 2000, 82 (1-4) :23-31
[5]   Optimised cantilever biosensor with piezoresistive read-out [J].
Rasmussen, PA ;
Thaysen, J ;
Hansen, O ;
Eriksen, SC ;
Boisen, A .
ULTRAMICROSCOPY, 2003, 97 (1-4) :371-376
[6]   Micromechanical measurement of active sites on silicon nitride using surface free energy variation [J].
Stephan, AC ;
Finot, EL ;
Ji, HF ;
Pinnaduwage, LA ;
Thundat, T .
ULTRAMICROSCOPY, 2002, 91 (1-4) :1-8
[7]  
TORTONESE M, 1991, 91CH28175 IEEE, P448
[8]   Bioassay of prostate-specific antigen (PSA) using microcantilevers [J].
Wu, GH ;
Datar, RH ;
Hansen, KM ;
Thundat, T ;
Cote, RJ ;
Majumdar, A .
NATURE BIOTECHNOLOGY, 2001, 19 (09) :856-860
[9]   Origin of nanomechanical cantilever motion generated from biomolecular interactions [J].
Wu, GH ;
Ji, HF ;
Hansen, K ;
Thundat, T ;
Datar, R ;
Cote, R ;
Hagan, MF ;
Chakraborty, AK ;
Majumdar, A .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2001, 98 (04) :1560-1564
[10]   Nerve agents detection using a Cu2+/L-cysteine bilayer-coated microcantilever [J].
Yang, YM ;
Ji, HF ;
Thundat, T .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2003, 125 (05) :1124-1125
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